JPH01164060U - - Google Patents
Info
- Publication number
- JPH01164060U JPH01164060U JP1988061936U JP6193688U JPH01164060U JP H01164060 U JPH01164060 U JP H01164060U JP 1988061936 U JP1988061936 U JP 1988061936U JP 6193688 U JP6193688 U JP 6193688U JP H01164060 U JPH01164060 U JP H01164060U
- Authority
- JP
- Japan
- Prior art keywords
- polishing surface
- surface plate
- runner
- groove
- polishing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005498 polishing Methods 0.000 claims description 11
- 239000007788 liquid Substances 0.000 claims description 6
- 239000002699 waste material Substances 0.000 claims description 6
- 230000002093 peripheral effect Effects 0.000 claims 1
Description
第１図は本考案の実施例の研磨装置の一部断面
図、第２図は本考案の廃液受けの取付構造の分解
斜視図、第３図は従来例の研磨装置の略線断面図
、第４図は従来例の廃液受けの取付構造の分解斜
視図である。
１……研磨定盤、２……ランナ、３……主軸、
４……スラスト油動圧軸受、５……ラジアル油動
圧軸受、６，１９……中央ベース、７……油、８
……モータ、９……プーリ、１０……ベルト、１
１……プーリ、１４……カバー、１５……駆動ピ
ン、１６……油タンク、１７……廃液受け、１８
……内側枠、２０……軸受部、２１……リング状
ベルト、２２……溝、１ａ……研磨定盤のガイド
部、１ｂ，２ａ……穴、３ａ……主軸ガイド、１
７ａ，１７ｂ……廃液の流入口、流出口。
FIG. 1 is a partial sectional view of a polishing device according to an embodiment of the present invention, FIG. 2 is an exploded perspective view of a mounting structure for a waste liquid receiver of the present invention, and FIG. 3 is a schematic cross-sectional view of a conventional polishing device. FIG. 4 is an exploded perspective view of a conventional mounting structure for a waste liquid receiver. 1... Polishing surface plate, 2... Runner, 3... Main shaft,
4...Thrust oil dynamic pressure bearing, 5...Radial oil dynamic pressure bearing, 6, 19...Central base, 7...Oil, 8
...Motor, 9...Pulley, 10...Belt, 1
1... Pulley, 14... Cover, 15... Drive pin, 16... Oil tank, 17... Waste liquid receiver, 18
... Inner frame, 20 ... Bearing part, 21 ... Ring-shaped belt, 22 ... Groove, 1a ... Guide part of polishing surface plate, 1b, 2a ... Hole, 3a ... Main shaft guide, 1
7a, 17b... Inflow port and outflow port for waste liquid.
Claims (1)
心に締結され、前記ランナの上部に取外し可能な
状態で設置された研磨定盤の外周側面に研磨定盤
の外径より小さい内径で弾性を有するリング状ベ
ルトを、前記研磨定盤の研磨面表面側に突き出な
いようにし、かつ前記研磨定盤の下側の裏面より
も突出して装着し、さらに、前記研磨定盤の前記
ランナと接する側の面の所定の位置に回転中心と
ほぼ同心円状の溝を設け、廃液受けの内側枠を前
記溝に当たらないようにはめ込んだ構造としたこ
とを特徴とする廃液浸入を防止した研磨装置。 A rotating main shaft driven by a drive source is fastened to the center of the runner, and an elastic ring with an inner diameter smaller than the outer diameter of the polishing surface plate is attached to the outer peripheral side of the polishing surface plate, which is removably installed above the runner. The shaped belt is mounted so as not to protrude to the surface of the polishing surface of the polishing surface plate and protrudes beyond the lower back surface of the polishing surface plate, and further, the belt is attached to the surface of the polishing surface plate on the side that contacts the runner. 1. A polishing device that prevents waste liquid from entering, characterized in that a groove is provided at a predetermined position substantially concentric with the center of rotation, and the inner frame of the waste liquid receiver is fitted into the groove so as not to hit the groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988061936U JPH0540928Y2 (en) | 1988-05-11 | 1988-05-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988061936U JPH0540928Y2 (en) | 1988-05-11 | 1988-05-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01164060U true JPH01164060U (en) | 1989-11-15 |
| JPH0540928Y2 JPH0540928Y2 (en) | 1993-10-18 |
Family
ID=31287576
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988061936U Expired - Lifetime JPH0540928Y2 (en) | 1988-05-11 | 1988-05-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0540928Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999033612A1 (en) * | 1997-12-26 | 1999-07-08 | Ebara Corporation | Polishing device |
| JP2019181689A (en) * | 2018-04-02 | 2019-10-24 | 株式会社荏原製作所 | Polishing device and substrate processing device |
-
1988
- 1988-05-11 JP JP1988061936U patent/JPH0540928Y2/ja not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999033612A1 (en) * | 1997-12-26 | 1999-07-08 | Ebara Corporation | Polishing device |
| JP2019181689A (en) * | 2018-04-02 | 2019-10-24 | 株式会社荏原製作所 | Polishing device and substrate processing device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0540928Y2 (en) | 1993-10-18 |
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