JPH0171223U - - Google Patents
Info
- Publication number
- JPH0171223U JPH0171223U JP1987167679U JP16767987U JPH0171223U JP H0171223 U JPH0171223 U JP H0171223U JP 1987167679 U JP1987167679 U JP 1987167679U JP 16767987 U JP16767987 U JP 16767987U JP H0171223 U JPH0171223 U JP H0171223U
- Authority
- JP
- Japan
- Prior art keywords
- electromagnet
- magnetic bearing
- sensor
- elastic member
- rotating shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Description
図面は実施例を示し、第１図は吸振機構を搭載
したターボ分子ポンプの磁気軸受装置の断面図、
第２図は第１図の要部拡大図、第３図は一部変形
例を示す部分の拡大図である。
２……回転軸（ロータシヤフト）、３……ケー
シング、３ａ……内周面、３ｂ……段部、５……
電磁石（上部ラジアルステータ）、６……電磁石
（下部ラジアルステータ）、６ａ……外周面、６
ｂ……上端面、６ｃ……外周溝、６ｄ……下端面
、７，８……ラジアルセンサ、９……スラストラ
ンナ、１０ａ，１０ｂ……電磁石（スラストステ
ータ）、１１……スラストセンサ、１４……弾性
部材（Ｏリング）、Ａ……空〓、１５……センサ
ホルダ、１６……スプリング、１７……ウエーブ
ワツシヤ。
The drawings show examples, and FIG. 1 is a cross-sectional view of a magnetic bearing device for a turbo molecular pump equipped with a vibration absorption mechanism.
FIG. 2 is an enlarged view of the main part of FIG. 1, and FIG. 3 is an enlarged view of a portion showing a partially modified example. 2... Rotating shaft (rotor shaft), 3... Casing, 3a... Inner peripheral surface, 3b... Step portion, 5...
Electromagnet (upper radial stator), 6... Electromagnet (lower radial stator), 6a... outer peripheral surface, 6
b... Upper end surface, 6c... Outer circumferential groove, 6d... Lower end surface, 7, 8... Radial sensor, 9... Thrust runner, 10a, 10b... Electromagnet (thrust stator), 11... Thrust sensor, 14 ...Elastic member (O-ring), A...Empty, 15...Sensor holder, 16...Spring, 17...Wave washer.
Claims (1)
御する能動形の磁気軸受において、前記電磁石を
弾性部材を介してケーシングに変位可能に保持さ
せたことを特徴とする磁気軸受の吸振機構。 1. A vibration absorbing mechanism for a magnetic bearing, characterized in that the electromagnet is held movably in a casing via an elastic member in an active type magnetic bearing that controls an electromagnet while detecting the position of a rotating shaft with a sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987167679U JPH0171223U (en) | 1987-10-30 | 1987-10-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987167679U JPH0171223U (en) | 1987-10-30 | 1987-10-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0171223U true JPH0171223U (en) | 1989-05-12 |
Family
ID=31456191
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987167679U Pending JPH0171223U (en) | 1987-10-30 | 1987-10-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0171223U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0482396U (en) * | 1990-11-29 | 1992-07-17 | ||
| JPH04339197A (en) * | 1991-05-15 | 1992-11-26 | Ebara Corp | Magnetic bearing device |
-
1987
- 1987-10-30 JP JP1987167679U patent/JPH0171223U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0482396U (en) * | 1990-11-29 | 1992-07-17 | ||
| JPH04339197A (en) * | 1991-05-15 | 1992-11-26 | Ebara Corp | Magnetic bearing device |