JPH01164060U - - Google Patents

Info

Publication number
JPH01164060U
JPH01164060U JP1988061936U JP6193688U JPH01164060U JP H01164060 U JPH01164060 U JP H01164060U JP 1988061936 U JP1988061936 U JP 1988061936U JP 6193688 U JP6193688 U JP 6193688U JP H01164060 U JPH01164060 U JP H01164060U
Authority
JP
Japan
Prior art keywords
polishing surface
surface plate
runner
groove
polishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1988061936U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0540928Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988061936U priority Critical patent/JPH0540928Y2/ja
Publication of JPH01164060U publication Critical patent/JPH01164060U/ja
Application granted granted Critical
Publication of JPH0540928Y2 publication Critical patent/JPH0540928Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
JP1988061936U 1988-05-11 1988-05-11 Expired - Lifetime JPH0540928Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988061936U JPH0540928Y2 (enrdf_load_stackoverflow) 1988-05-11 1988-05-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988061936U JPH0540928Y2 (enrdf_load_stackoverflow) 1988-05-11 1988-05-11

Publications (2)

Publication Number Publication Date
JPH01164060U true JPH01164060U (enrdf_load_stackoverflow) 1989-11-15
JPH0540928Y2 JPH0540928Y2 (enrdf_load_stackoverflow) 1993-10-18

Family

ID=31287576

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988061936U Expired - Lifetime JPH0540928Y2 (enrdf_load_stackoverflow) 1988-05-11 1988-05-11

Country Status (1)

Country Link
JP (1) JPH0540928Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999033612A1 (fr) * 1997-12-26 1999-07-08 Ebara Corporation Dispositif de polissage
JP2019181689A (ja) * 2018-04-02 2019-10-24 株式会社荏原製作所 研磨装置及び基板処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999033612A1 (fr) * 1997-12-26 1999-07-08 Ebara Corporation Dispositif de polissage
JP2019181689A (ja) * 2018-04-02 2019-10-24 株式会社荏原製作所 研磨装置及び基板処理装置

Also Published As

Publication number Publication date
JPH0540928Y2 (enrdf_load_stackoverflow) 1993-10-18

Similar Documents

Publication Publication Date Title
US6264539B1 (en) Mechanism for slowing down idling shoe of an electric polisher
JPH01164060U (enrdf_load_stackoverflow)
JPS62138221U (enrdf_load_stackoverflow)
JPS6293457U (enrdf_load_stackoverflow)
JPH0418725U (enrdf_load_stackoverflow)
JPS61107977U (enrdf_load_stackoverflow)
JPS63130946U (enrdf_load_stackoverflow)
JPS6144297Y2 (enrdf_load_stackoverflow)
JPH0396939U (enrdf_load_stackoverflow)
JPS62201651U (enrdf_load_stackoverflow)
JPH02127404U (enrdf_load_stackoverflow)
JPS63144613U (enrdf_load_stackoverflow)
JPH0210771U (enrdf_load_stackoverflow)
JPH0447961U (enrdf_load_stackoverflow)
JPS63177675U (enrdf_load_stackoverflow)
JPS62200467U (enrdf_load_stackoverflow)
JPH0478367U (enrdf_load_stackoverflow)
JPH0226152U (enrdf_load_stackoverflow)
JPH02122199U (enrdf_load_stackoverflow)
JPS63181844U (enrdf_load_stackoverflow)
JPH0281958U (enrdf_load_stackoverflow)
JPS61175349U (enrdf_load_stackoverflow)
JPS61124451U (enrdf_load_stackoverflow)
JPH0295012U (enrdf_load_stackoverflow)
JPS61124458U (enrdf_load_stackoverflow)