JPH0538527Y2 - - Google Patents
Info
- Publication number
- JPH0538527Y2 JPH0538527Y2 JP1984199347U JP19934784U JPH0538527Y2 JP H0538527 Y2 JPH0538527 Y2 JP H0538527Y2 JP 1984199347 U JP1984199347 U JP 1984199347U JP 19934784 U JP19934784 U JP 19934784U JP H0538527 Y2 JPH0538527 Y2 JP H0538527Y2
- Authority
- JP
- Japan
- Prior art keywords
- stage
- sample
- drive mechanism
- pressure
- rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984199347U JPH0538527Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1984-12-28 | 1984-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984199347U JPH0538527Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1984-12-28 | 1984-12-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61114755U JPS61114755U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-07-19 |
| JPH0538527Y2 true JPH0538527Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-09-29 |
Family
ID=30759184
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984199347U Expired - Lifetime JPH0538527Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1984-12-28 | 1984-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0538527Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3667884B2 (ja) * | 1996-06-27 | 2005-07-06 | Ｊｆｅスチール株式会社 | 局所分析装置 |
| JP2000021345A (ja) * | 1998-07-06 | 2000-01-21 | Hitachi Ltd | 走査型電子顕微鏡 |
| JP3865752B2 (ja) * | 2005-03-18 | 2007-01-10 | Ｊｆｅスチール株式会社 | 局所分析装置 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS583586B2 (ja) * | 1977-03-30 | 1983-01-21 | 株式会社日立製作所 | 走査形電子顕微鏡 |
| JPS59194043U (ja) * | 1983-06-09 | 1984-12-24 | セイコーインスツルメンツ株式会社 | 除振支持装置 |
-
1984
- 1984-12-28 JP JP1984199347U patent/JPH0538527Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61114755U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-07-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH06126615A (ja) | ウエハーの研磨装置 | |
| US8318074B2 (en) | Transfer apparatus having gimbal mechanism and transfer method using the transfer apparatus | |
| JPH0538527Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
| US7076996B2 (en) | Environmental scanning probe microscope | |
| JPS632739B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
| US2664259A (en) | Hanger | |
| US5150040A (en) | Dual-mode z-stage | |
| AU2068695A (en) | Process and device for lacquering or coating a substrate | |
| JP2665258B2 (ja) | 三次元形状の形成方法 | |
| JP2005240121A (ja) | 真空蒸着用アライメント装置 | |
| JPH11354520A (ja) | 集束イオンビーム加工装置 | |
| JPS583586B2 (ja) | 走査形電子顕微鏡 | |
| US20020121504A1 (en) | Electron beam irradiation system and electron beam irradiation method | |
| JPH10153726A (ja) | 光学素子姿勢調整装置 | |
| CN113718209B (zh) | 一种用于平面阴极装置的升降式调整装置 | |
| US20020117636A1 (en) | Electron beam irradiation system and electron beam irradiation method | |
| JPH0843099A (ja) | マーキング装置およびそれを用いた建築物の墨出し方法 | |
| JP2010163692A (ja) | 真空蒸着用アライメント装置 | |
| CN209764058U (zh) | 同心度测量仪用支架 | |
| JPH0451415Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
| US4493166A (en) | Ultra precise tool forming apparatus | |
| JPS6244453Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
| JP2593054B2 (ja) | 研磨装置 | |
| CN218985918U (zh) | 一种防水瓦楞纸箱上光油装置 | |
| JPH01124232A (ja) | レベリング装置 |