JPH0534319B2 - - Google Patents

Info

Publication number
JPH0534319B2
JPH0534319B2 JP62296006A JP29600687A JPH0534319B2 JP H0534319 B2 JPH0534319 B2 JP H0534319B2 JP 62296006 A JP62296006 A JP 62296006A JP 29600687 A JP29600687 A JP 29600687A JP H0534319 B2 JPH0534319 B2 JP H0534319B2
Authority
JP
Japan
Prior art keywords
diamond
film
substrate
nucleation
present
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62296006A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01138198A (ja
Inventor
Kazutaka Fujii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP62296006A priority Critical patent/JPH01138198A/ja
Publication of JPH01138198A publication Critical patent/JPH01138198A/ja
Publication of JPH0534319B2 publication Critical patent/JPH0534319B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Formation Of Insulating Films (AREA)
JP62296006A 1987-11-26 1987-11-26 ダイヤモンド膜の製造方法 Granted JPH01138198A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62296006A JPH01138198A (ja) 1987-11-26 1987-11-26 ダイヤモンド膜の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62296006A JPH01138198A (ja) 1987-11-26 1987-11-26 ダイヤモンド膜の製造方法

Publications (2)

Publication Number Publication Date
JPH01138198A JPH01138198A (ja) 1989-05-31
JPH0534319B2 true JPH0534319B2 (OSRAM) 1993-05-21

Family

ID=17827912

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62296006A Granted JPH01138198A (ja) 1987-11-26 1987-11-26 ダイヤモンド膜の製造方法

Country Status (1)

Country Link
JP (1) JPH01138198A (OSRAM)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04219396A (ja) * 1988-07-02 1992-08-10 Sumitomo Metal Mining Co Ltd ダイヤモンド膜作成方法
EP0630994B1 (en) * 1993-01-14 1999-04-07 Sumitomo Electric Industries, Ltd. Process for vapor-phase diamond synthesis
US6068883A (en) * 1996-06-12 2000-05-30 Matushita Electric Industrial Co., Ltd. Process for forming diamond films by nucleation
JP4009090B2 (ja) * 2001-11-08 2007-11-14 株式会社神戸製鋼所 ダイヤモンド被覆非ダイヤモンド炭素部材の製造方法
JP6772995B2 (ja) * 2017-09-25 2020-10-21 株式会社Sumco Ｓｏｉウェーハの製造方法およびｓｏｉウェーハ

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61106494A (ja) * 1984-10-29 1986-05-24 Kyocera Corp ダイヤモンド被膜部材及びその製法
JPS61146793A (ja) * 1984-12-21 1986-07-04 Toshiba Corp 基板
JPH0723279B2 (ja) * 1986-04-30 1995-03-15 京セラ株式会社 ダイヤモンド膜の製造方法

Also Published As

Publication number Publication date
JPH01138198A (ja) 1989-05-31

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