JPH01138198A - ダイヤモンド膜の製造方法 - Google Patents
ダイヤモンド膜の製造方法Info
- Publication number
- JPH01138198A JPH01138198A JP62296006A JP29600687A JPH01138198A JP H01138198 A JPH01138198 A JP H01138198A JP 62296006 A JP62296006 A JP 62296006A JP 29600687 A JP29600687 A JP 29600687A JP H01138198 A JPH01138198 A JP H01138198A
- Authority
- JP
- Japan
- Prior art keywords
- diamond
- film
- substrate
- carbon film
- crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010432 diamond Substances 0.000 title claims abstract description 44
- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 43
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 8
- 239000000758 substrate Substances 0.000 claims abstract description 15
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 9
- 239000013081 microcrystal Substances 0.000 claims description 6
- 239000013078 crystal Substances 0.000 abstract description 13
- 230000006911 nucleation Effects 0.000 abstract description 10
- 238000010899 nucleation Methods 0.000 abstract description 10
- 238000000034 method Methods 0.000 abstract description 9
- 230000015572 biosynthetic process Effects 0.000 abstract description 6
- 238000000151 deposition Methods 0.000 abstract description 2
- 239000002245 particle Substances 0.000 abstract description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 150000001721 carbon Chemical class 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Carbon And Carbon Compounds (AREA)
- Electrodes Of Semiconductors (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62296006A JPH01138198A (ja) | 1987-11-26 | 1987-11-26 | ダイヤモンド膜の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62296006A JPH01138198A (ja) | 1987-11-26 | 1987-11-26 | ダイヤモンド膜の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01138198A true JPH01138198A (ja) | 1989-05-31 |
| JPH0534319B2 JPH0534319B2 (OSRAM) | 1993-05-21 |
Family
ID=17827912
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62296006A Granted JPH01138198A (ja) | 1987-11-26 | 1987-11-26 | ダイヤモンド膜の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01138198A (OSRAM) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04219396A (ja) * | 1988-07-02 | 1992-08-10 | Sumitomo Metal Mining Co Ltd | ダイヤモンド膜作成方法 |
| WO1994016125A1 (fr) * | 1993-01-14 | 1994-07-21 | Sumitomo Electric Industries, Ltd. | Procede de synthese de diamant en phase vapeur |
| US6068883A (en) * | 1996-06-12 | 2000-05-30 | Matushita Electric Industrial Co., Ltd. | Process for forming diamond films by nucleation |
| JP2003147527A (ja) * | 2001-11-08 | 2003-05-21 | Kobe Steel Ltd | ダイヤモンド被覆非ダイヤモンド炭素部材及びその製造方法 |
| JP2019062020A (ja) * | 2017-09-25 | 2019-04-18 | 株式会社Sumco | Ｓｏｉウェーハの製造方法およびｓｏｉウェーハ |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61106494A (ja) * | 1984-10-29 | 1986-05-24 | Kyocera Corp | ダイヤモンド被膜部材及びその製法 |
| JPS61146793A (ja) * | 1984-12-21 | 1986-07-04 | Toshiba Corp | 基板 |
| JPS62256795A (ja) * | 1986-04-30 | 1987-11-09 | Kyocera Corp | ダイヤモンド膜の製造方法 |
-
1987
- 1987-11-26 JP JP62296006A patent/JPH01138198A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61106494A (ja) * | 1984-10-29 | 1986-05-24 | Kyocera Corp | ダイヤモンド被膜部材及びその製法 |
| JPS61146793A (ja) * | 1984-12-21 | 1986-07-04 | Toshiba Corp | 基板 |
| JPS62256795A (ja) * | 1986-04-30 | 1987-11-09 | Kyocera Corp | ダイヤモンド膜の製造方法 |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04219396A (ja) * | 1988-07-02 | 1992-08-10 | Sumitomo Metal Mining Co Ltd | ダイヤモンド膜作成方法 |
| WO1994016125A1 (fr) * | 1993-01-14 | 1994-07-21 | Sumitomo Electric Industries, Ltd. | Procede de synthese de diamant en phase vapeur |
| US5499601A (en) * | 1993-01-14 | 1996-03-19 | Sumitomo Electric Industries, Ltd. | Method for vapor phase synthesis of diamond |
| US6068883A (en) * | 1996-06-12 | 2000-05-30 | Matushita Electric Industrial Co., Ltd. | Process for forming diamond films by nucleation |
| JP2003147527A (ja) * | 2001-11-08 | 2003-05-21 | Kobe Steel Ltd | ダイヤモンド被覆非ダイヤモンド炭素部材及びその製造方法 |
| JP2019062020A (ja) * | 2017-09-25 | 2019-04-18 | 株式会社Sumco | Ｓｏｉウェーハの製造方法およびｓｏｉウェーハ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0534319B2 (OSRAM) | 1993-05-21 |
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