JPH0533812B2 - - Google Patents

Info

Publication number
JPH0533812B2
JPH0533812B2 JP62062666A JP6266687A JPH0533812B2 JP H0533812 B2 JPH0533812 B2 JP H0533812B2 JP 62062666 A JP62062666 A JP 62062666A JP 6266687 A JP6266687 A JP 6266687A JP H0533812 B2 JPH0533812 B2 JP H0533812B2
Authority
JP
Japan
Prior art keywords
film
plasma
gas
reaction
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62062666A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63229711A (ja
Inventor
Yasuo Tarui
Shinji Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Priority to JP62062666A priority Critical patent/JPS63229711A/ja
Publication of JPS63229711A publication Critical patent/JPS63229711A/ja
Publication of JPH0533812B2 publication Critical patent/JPH0533812B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Photovoltaic Devices (AREA)
JP62062666A 1987-03-19 1987-03-19 成膜装置 Granted JPS63229711A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62062666A JPS63229711A (ja) 1987-03-19 1987-03-19 成膜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62062666A JPS63229711A (ja) 1987-03-19 1987-03-19 成膜装置

Publications (2)

Publication Number Publication Date
JPS63229711A JPS63229711A (ja) 1988-09-26
JPH0533812B2 true JPH0533812B2 (enrdf_load_stackoverflow) 1993-05-20

Family

ID=13206844

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62062666A Granted JPS63229711A (ja) 1987-03-19 1987-03-19 成膜装置

Country Status (1)

Country Link
JP (1) JPS63229711A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0477229U (enrdf_load_stackoverflow) * 1990-11-20 1992-07-06
JP5836144B2 (ja) * 2012-01-31 2015-12-24 東京エレクトロン株式会社 マイクロ波放射機構および表面波プラズマ処理装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4042850A (en) * 1976-03-17 1977-08-16 Fusion Systems Corporation Microwave generated radiation apparatus
JPS58159842A (ja) * 1982-03-17 1983-09-22 Ricoh Co Ltd 感光体の製造方法
JPS61241930A (ja) * 1985-04-18 1986-10-28 Matsushita Electric Ind Co Ltd プラズマｃｖｄ装置
US4582773A (en) * 1985-05-02 1986-04-15 Energy Conversion Devices, Inc. Electrophotographic photoreceptor and method for the fabrication thereof

Also Published As

Publication number Publication date
JPS63229711A (ja) 1988-09-26

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