JPH0533812B2 - - Google Patents

Info

Publication number
JPH0533812B2
JPH0533812B2 JP6266687A JP6266687A JPH0533812B2 JP H0533812 B2 JPH0533812 B2 JP H0533812B2 JP 6266687 A JP6266687 A JP 6266687A JP 6266687 A JP6266687 A JP 6266687A JP H0533812 B2 JPH0533812 B2 JP H0533812B2
Authority
JP
Grant status
Grant
Patent type
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP6266687A
Other versions
JPS63229711A (en )
Inventor
Yasuo Tarui
Shinji Suzuki
Original Assignee
Yasuo Tarui
Ushio Denki Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Grant date

Links

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
JP6266687A 1987-03-19 1987-03-19 Expired - Lifetime JPH0533812B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6266687A JPH0533812B2 (en) 1987-03-19 1987-03-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6266687A JPH0533812B2 (en) 1987-03-19 1987-03-19

Publications (2)

Publication Number Publication Date
JPS63229711A true JPS63229711A (en) 1988-09-26
JPH0533812B2 true JPH0533812B2 (en) 1993-05-20

Family

ID=13206844

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6266687A Expired - Lifetime JPH0533812B2 (en) 1987-03-19 1987-03-19

Country Status (1)

Country Link
JP (1) JPH0533812B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0477229U (en) * 1990-11-20 1992-07-06
JP5836144B2 (en) * 2012-01-31 2015-12-24 東京エレクトロン株式会社 Microwave radiation mechanism and surface wave plasma processing apparatus

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52116155A (en) * 1976-03-17 1977-09-29 Fusion Systems Corp Radio wave generator by microwave
JPS58159842A (en) * 1982-03-17 1983-09-22 Ricoh Co Ltd Manufacture of photoreceptor
JPS61241930A (en) * 1985-04-18 1986-10-28 Matsushita Electric Ind Co Ltd Plasma chemical vapor deposition device
JPS61254954A (en) * 1985-05-02 1986-11-12 Energy Conversion Devices Inc Improved photo receptacle for electrophotography and manufacture thereof

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52116155A (en) * 1976-03-17 1977-09-29 Fusion Systems Corp Radio wave generator by microwave
JPS58159842A (en) * 1982-03-17 1983-09-22 Ricoh Co Ltd Manufacture of photoreceptor
JPS61241930A (en) * 1985-04-18 1986-10-28 Matsushita Electric Ind Co Ltd Plasma chemical vapor deposition device
JPS61254954A (en) * 1985-05-02 1986-11-12 Energy Conversion Devices Inc Improved photo receptacle for electrophotography and manufacture thereof

Also Published As

Publication number Publication date Type
JPS63229711A (en) 1988-09-26 application

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