JPH0533004Y2 - - Google Patents

Info

Publication number
JPH0533004Y2
JPH0533004Y2 JP1988036336U JP3633688U JPH0533004Y2 JP H0533004 Y2 JPH0533004 Y2 JP H0533004Y2 JP 1988036336 U JP1988036336 U JP 1988036336U JP 3633688 U JP3633688 U JP 3633688U JP H0533004 Y2 JPH0533004 Y2 JP H0533004Y2
Authority
JP
Japan
Prior art keywords
resist
processing chamber
lamp house
lamp
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988036336U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01140819U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988036336U priority Critical patent/JPH0533004Y2/ja
Publication of JPH01140819U publication Critical patent/JPH01140819U/ja
Application granted granted Critical
Publication of JPH0533004Y2 publication Critical patent/JPH0533004Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1988036336U 1988-03-22 1988-03-22 Expired - Lifetime JPH0533004Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988036336U JPH0533004Y2 (enExample) 1988-03-22 1988-03-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988036336U JPH0533004Y2 (enExample) 1988-03-22 1988-03-22

Publications (2)

Publication Number Publication Date
JPH01140819U JPH01140819U (enExample) 1989-09-27
JPH0533004Y2 true JPH0533004Y2 (enExample) 1993-08-23

Family

ID=31262946

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988036336U Expired - Lifetime JPH0533004Y2 (enExample) 1988-03-22 1988-03-22

Country Status (1)

Country Link
JP (1) JPH0533004Y2 (enExample)

Also Published As

Publication number Publication date
JPH01140819U (enExample) 1989-09-27

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