JPH0532848Y2 - - Google Patents

Info

Publication number
JPH0532848Y2
JPH0532848Y2 JP1985022844U JP2284485U JPH0532848Y2 JP H0532848 Y2 JPH0532848 Y2 JP H0532848Y2 JP 1985022844 U JP1985022844 U JP 1985022844U JP 2284485 U JP2284485 U JP 2284485U JP H0532848 Y2 JPH0532848 Y2 JP H0532848Y2
Authority
JP
Japan
Prior art keywords
nozzle
mask
view
spray
developer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985022844U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61140355U (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985022844U priority Critical patent/JPH0532848Y2/ja
Publication of JPS61140355U publication Critical patent/JPS61140355U/ja
Application granted granted Critical
Publication of JPH0532848Y2 publication Critical patent/JPH0532848Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1985022844U 1985-02-20 1985-02-20 Expired - Lifetime JPH0532848Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985022844U JPH0532848Y2 (cs) 1985-02-20 1985-02-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985022844U JPH0532848Y2 (cs) 1985-02-20 1985-02-20

Publications (2)

Publication Number Publication Date
JPS61140355U JPS61140355U (cs) 1986-08-30
JPH0532848Y2 true JPH0532848Y2 (cs) 1993-08-23

Family

ID=30515522

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985022844U Expired - Lifetime JPH0532848Y2 (cs) 1985-02-20 1985-02-20

Country Status (1)

Country Link
JP (1) JPH0532848Y2 (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH088207B2 (ja) * 1989-06-12 1996-01-29 富士通株式会社 スプレー現像方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5732446A (en) * 1980-08-04 1982-02-22 Mitsubishi Electric Corp Resist developing device
JPS59232417A (ja) * 1983-06-16 1984-12-27 Toshiba Corp 半導体ウエ−ハのレジスト現像装置
JPS61160930A (ja) * 1985-01-09 1986-07-21 Dainippon Screen Mfg Co Ltd 基板の表面処理液供給方法

Also Published As

Publication number Publication date
JPS61140355U (cs) 1986-08-30

Similar Documents

Publication Publication Date Title
US5000671A (en) Machine for imprinting sculptured designs on walls and ceilings
JPH0532848Y2 (cs)
DE2643750C2 (cs)
JPS57110674A (en) Surface treating device
JPH01135564A (ja) 塗布装置
JPH05134400A (ja) フオトマスクの現像エツチング装置洗浄用治具
JPH04206626A (ja) 周辺レジスト除去方法
JPS60195546A (ja) マスク用基板
JPH03256321A (ja) レジスト膜形成装置
JPH04196425A (ja) 薬液処理装置
JPH1140654A5 (cs)
JPS57164985A (en) Surface treatment of substrate to be treated
JPH01274426A (ja) 半導体装置製造のポジレジスト除去方法
JPH01164035A (ja) 半導体製造装置
JPS6353925A (ja) レジストのマスク塗布方法
JPH0537469Y2 (cs)
JPH0754997Y2 (ja) フォトレジスト塗布装置
JPS6210075U (cs)
JPH03120029U (cs)
JPS62144332A (ja) アルミスピンスプレ−エツチング装置
KR920008539A (ko) 감광제 도포장치
KR970063415A (ko) 웨이퍼 현상방법
KR950027996A (ko) 웨이퍼 에지부의 감광막 제거방법
JPH088207B2 (ja) スプレー現像方法
KR980011996A (ko) 반도체 소자 제조 장치