JPH0532697B2 - - Google Patents

Info

Publication number
JPH0532697B2
JPH0532697B2 JP63012610A JP1261088A JPH0532697B2 JP H0532697 B2 JPH0532697 B2 JP H0532697B2 JP 63012610 A JP63012610 A JP 63012610A JP 1261088 A JP1261088 A JP 1261088A JP H0532697 B2 JPH0532697 B2 JP H0532697B2
Authority
JP
Japan
Prior art keywords
tin oxide
gas
sno
sputtering
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP63012610A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01189553A (ja
Inventor
Yukio Nakanochi
Yasutaro Tawara
Wataru Sato
Kazuhiro Takahashi
Takeshi Masumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Riken Keiki KK
Riken Corp
Original Assignee
Riken Keiki KK
Riken Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Riken Keiki KK, Riken Corp filed Critical Riken Keiki KK
Priority to JP1261088A priority Critical patent/JPH01189553A/ja
Publication of JPH01189553A publication Critical patent/JPH01189553A/ja
Publication of JPH0532697B2 publication Critical patent/JPH0532697B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP1261088A 1988-01-25 1988-01-25 ガスセンサー用酸化スズ半導体およびその製造方法 Granted JPH01189553A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1261088A JPH01189553A (ja) 1988-01-25 1988-01-25 ガスセンサー用酸化スズ半導体およびその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1261088A JPH01189553A (ja) 1988-01-25 1988-01-25 ガスセンサー用酸化スズ半導体およびその製造方法

Publications (2)

Publication Number Publication Date
JPH01189553A JPH01189553A (ja) 1989-07-28
JPH0532697B2 true JPH0532697B2 (enExample) 1993-05-17

Family

ID=11810133

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1261088A Granted JPH01189553A (ja) 1988-01-25 1988-01-25 ガスセンサー用酸化スズ半導体およびその製造方法

Country Status (1)

Country Link
JP (1) JPH01189553A (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2582343B2 (ja) * 1993-12-04 1997-02-19 エルジー電子株式会社 低消費電力型薄膜ガスセンサ及びその製造方法
JP3823520B2 (ja) 1998-03-11 2006-09-20 日産化学工業株式会社 無水アンチモン酸亜鉛半導体ガスセンサー及びその製造方法
KR100477422B1 (ko) * 2002-01-11 2005-03-23 동양물산기업 주식회사 암모니아 가스 검지용 반도체식 박막 가스 센서의 제조방법 및 센서 소자
EP2098855B1 (en) * 2006-12-28 2015-12-09 Mikuni Corp. Hydrogen sensor and method for manufacturing the same
CN101329294B (zh) 2007-06-22 2012-05-23 郑州炜盛电子科技有限公司 一种抗干扰性强的气体传感器
CN101329293B (zh) 2007-06-22 2012-05-23 郑州炜盛电子科技有限公司 一种用于酒精蒸汽和呼气酒精检测的半导体气体传感器
EP2278308B1 (en) * 2008-04-22 2018-12-19 Ngk Spark Plug Co., Ltd. Gas sensor
CN101368930B (zh) 2008-09-02 2011-10-12 徐州市精英电器技术有限公司 卤素制冷剂检测传感器敏感材料及气敏元件的制造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4889792A (enExample) * 1972-02-28 1973-11-22
DE3032476A1 (de) * 1980-08-28 1982-04-01 Siemens AG, 1000 Berlin und 8000 München Selektiver duennschicht-gassensor hoher empfindlichkeit und stabilitaet zum nachweis und zur messung von gasfoermigen kohlenwasserstoff-verunreinigungen in der luft auf der basis von wolframoxid (wo(pfeil abwaerts)x(pfeil abwaerts))-halbleitern, sowie ein verfahren zu seiner herstellung
JPS607353A (ja) * 1983-06-27 1985-01-16 Toshiba Corp 感ガス素子

Also Published As

Publication number Publication date
JPH01189553A (ja) 1989-07-28

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