WO2008081921A1 - 水素センサ及びその製造方法 - Google Patents
水素センサ及びその製造方法 Download PDFInfo
- Publication number
- WO2008081921A1 WO2008081921A1 PCT/JP2007/075261 JP2007075261W WO2008081921A1 WO 2008081921 A1 WO2008081921 A1 WO 2008081921A1 JP 2007075261 W JP2007075261 W JP 2007075261W WO 2008081921 A1 WO2008081921 A1 WO 2008081921A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- ceramic
- manufacturing
- same
- hydrogen sensor
- film
- Prior art date
Links
- 229910052739 hydrogen Inorganic materials 0.000 title abstract 5
- 239000001257 hydrogen Substances 0.000 title abstract 5
- 125000004435 hydrogen atom Chemical class [H]* 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 239000000919 ceramic Substances 0.000 abstract 4
- 238000001514 detection method Methods 0.000 abstract 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 abstract 3
- 239000002923 metal particle Substances 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 150000002431 hydrogen Chemical class 0.000 abstract 1
- 229910052761 rare earth metal Inorganic materials 0.000 abstract 1
- 150000002910 rare earth metals Chemical class 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
- G01N33/005—H2
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Pathology (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Combustion & Propulsion (AREA)
- Food Science & Technology (AREA)
- Medicinal Chemistry (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
本発明により、基板(2)と、該基板(2)上に形成されてなる検知膜(4)と、該検知膜(4)上に形成されてなる水素透過性保護膜(10)とを有し、前記検知膜(4)は第1のセラミックス(6)と前記第1のセラミックス(6)に分散した希土類金属粒子(8)とからなり、前記保護膜(10)は第2のセラミックス(12)と前記第2のセラミックス(12)中に分散した水素透過性金属粒子(14)とからなる、水素センサ(100)が開示される。検知膜(4)の厚みは5~1000nm、水素透過性保護膜(10)の厚みは5~40nmが好ましい。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/521,234 US8205482B2 (en) | 2006-12-28 | 2007-12-28 | Hydrogen sensor with detection film comprised of rare earth metal particles dispersed in a ceramic |
EP07860464.2A EP2098855B1 (en) | 2006-12-28 | 2007-12-28 | Hydrogen sensor and method for manufacturing the same |
JP2008552176A JP5184375B2 (ja) | 2006-12-28 | 2007-12-28 | 水素センサ及びその製造方法 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006356334 | 2006-12-28 | ||
JP2006-356334 | 2006-12-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2008081921A1 true WO2008081921A1 (ja) | 2008-07-10 |
Family
ID=39588601
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2007/075261 WO2008081921A1 (ja) | 2006-12-28 | 2007-12-28 | 水素センサ及びその製造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US8205482B2 (ja) |
EP (1) | EP2098855B1 (ja) |
JP (1) | JP5184375B2 (ja) |
WO (1) | WO2008081921A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010210468A (ja) * | 2009-03-11 | 2010-09-24 | Mikuni Corp | 水素センサ及びその製造方法 |
JP2015197343A (ja) * | 2014-03-31 | 2015-11-09 | 国立大学法人岩手大学 | 水素センサ |
WO2017065205A1 (ja) * | 2015-10-13 | 2017-04-20 | 株式会社ミクニ | 水素センサおよびその製造方法 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5452140B2 (ja) * | 2009-09-03 | 2014-03-26 | 日本航空電子工業株式会社 | 水素検出用表面プラズモン共鳴素子、表面プラズモン共鳴式光学水素検出器及び表面プラズモン共鳴を利用して光学的に水素を検出する方法 |
DE102010032075A1 (de) * | 2010-07-23 | 2012-01-26 | Eads Deutschland Gmbh | Wasserstofferzeugung mittels hydrierten Polysilanen zum Betrieb von Brennstoffzellen |
US20150257942A1 (en) * | 2012-10-04 | 2015-09-17 | Donggyu Kim | Monitoring system for infant and patients with advanced disease for automatically alerting of urine and feces |
EP3455613A4 (en) | 2016-05-12 | 2019-12-18 | Maxwellian Inc. | FIBER OPTICAL SENSOR |
JP7017994B2 (ja) * | 2017-08-08 | 2022-02-09 | 日東電工株式会社 | ガス検知エレメント |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5780550A (en) * | 1980-11-06 | 1982-05-20 | Matsushita Electric Ind Co Ltd | Detecting element for combustible gas and manufacture thereof |
JPS62222153A (ja) * | 1984-09-29 | 1987-09-30 | Hiroshi Komiyama | 金属と誘電体とを含むガス感応性複合体とその製造方法 |
JP2002535651A (ja) | 1999-01-15 | 2002-10-22 | アドバンスド.テクノロジー.マテリアルス.インコーポレイテッド | 微細加工薄膜水素ガスセンサーおよびその製造方法および使用方法 |
EP1568991A1 (en) | 2004-02-27 | 2005-08-31 | Mikuni Corporation | Hydrogen sensor and process for production thereof |
JP2005274559A (ja) | 2004-02-27 | 2005-10-06 | Mikuni Corp | 水素センサー及びその製造方法 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01189553A (ja) * | 1988-01-25 | 1989-07-28 | Riken Corp | ガスセンサー用酸化スズ半導体およびその製造方法 |
US6344271B1 (en) * | 1998-11-06 | 2002-02-05 | Nanoenergy Corporation | Materials and products using nanostructured non-stoichiometric substances |
US6006582A (en) * | 1998-03-17 | 1999-12-28 | Advanced Technology Materials, Inc. | Hydrogen sensor utilizing rare earth metal thin film detection element |
US6596236B2 (en) * | 1999-01-15 | 2003-07-22 | Advanced Technology Materials, Inc. | Micro-machined thin film sensor arrays for the detection of H2 containing gases, and method of making and using the same |
DE10011562C2 (de) * | 2000-03-09 | 2003-05-22 | Daimler Chrysler Ag | Gassensor |
US6555159B2 (en) * | 2000-12-18 | 2003-04-29 | Delphi Technologies, Inc. | Coating for gas sensors |
US6562747B2 (en) * | 2000-12-19 | 2003-05-13 | Delphi Technologies, Inc. | Gas sensor electrolyte |
US7361386B2 (en) * | 2002-07-22 | 2008-04-22 | The Regents Of The University Of California | Functional coatings for the reduction of oxygen permeation and stress and method of forming the same |
US20040093928A1 (en) * | 2002-11-20 | 2004-05-20 | Dimeo Frank | Rare earth metal sensor |
US7393392B2 (en) * | 2004-02-27 | 2008-07-01 | Mikuni Corporation | Hydrogen-permeable membrane and process for production thereof |
US20050214170A1 (en) * | 2004-03-23 | 2005-09-29 | Webasto Ag | Gas sensor and process for producing a gas sensor |
JP4056987B2 (ja) * | 2004-04-28 | 2008-03-05 | アルプス電気株式会社 | 水素センサ及び水素の検知方法 |
WO2008045568A2 (en) * | 2006-10-12 | 2008-04-17 | Nextech Materials, Ltd. | Hydrogen sensitive composite material, tubular sensor for detecting hydrogen and other gases |
-
2007
- 2007-12-28 JP JP2008552176A patent/JP5184375B2/ja not_active Expired - Fee Related
- 2007-12-28 US US12/521,234 patent/US8205482B2/en not_active Expired - Fee Related
- 2007-12-28 WO PCT/JP2007/075261 patent/WO2008081921A1/ja active Application Filing
- 2007-12-28 EP EP07860464.2A patent/EP2098855B1/en not_active Not-in-force
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5780550A (en) * | 1980-11-06 | 1982-05-20 | Matsushita Electric Ind Co Ltd | Detecting element for combustible gas and manufacture thereof |
JPS62222153A (ja) * | 1984-09-29 | 1987-09-30 | Hiroshi Komiyama | 金属と誘電体とを含むガス感応性複合体とその製造方法 |
JP2002535651A (ja) | 1999-01-15 | 2002-10-22 | アドバンスド.テクノロジー.マテリアルス.インコーポレイテッド | 微細加工薄膜水素ガスセンサーおよびその製造方法および使用方法 |
EP1568991A1 (en) | 2004-02-27 | 2005-08-31 | Mikuni Corporation | Hydrogen sensor and process for production thereof |
JP2005274559A (ja) | 2004-02-27 | 2005-10-06 | Mikuni Corp | 水素センサー及びその製造方法 |
Non-Patent Citations (1)
Title |
---|
See also references of EP2098855A4 * |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010210468A (ja) * | 2009-03-11 | 2010-09-24 | Mikuni Corp | 水素センサ及びその製造方法 |
JP2015197343A (ja) * | 2014-03-31 | 2015-11-09 | 国立大学法人岩手大学 | 水素センサ |
WO2017065205A1 (ja) * | 2015-10-13 | 2017-04-20 | 株式会社ミクニ | 水素センサおよびその製造方法 |
JP2017075802A (ja) * | 2015-10-13 | 2017-04-20 | 株式会社ミクニ | 水素センサおよびその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
US8205482B2 (en) | 2012-06-26 |
EP2098855B1 (en) | 2015-12-09 |
US20100089123A1 (en) | 2010-04-15 |
EP2098855A1 (en) | 2009-09-09 |
JPWO2008081921A1 (ja) | 2010-04-30 |
JP5184375B2 (ja) | 2013-04-17 |
EP2098855A4 (en) | 2013-01-09 |
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