JPH0532471B2 - - Google Patents

Info

Publication number
JPH0532471B2
JPH0532471B2 JP7907486A JP7907486A JPH0532471B2 JP H0532471 B2 JPH0532471 B2 JP H0532471B2 JP 7907486 A JP7907486 A JP 7907486A JP 7907486 A JP7907486 A JP 7907486A JP H0532471 B2 JPH0532471 B2 JP H0532471B2
Authority
JP
Japan
Prior art keywords
thin film
film forming
cooling
cvd thin
cvd
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP7907486A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62238367A (ja
Inventor
Katsumi Ooyama
Hitoshi Hikima
Kazuo Taniguchi
Yukio Murakawa
Katsumi Takami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP7907486A priority Critical patent/JPS62238367A/ja
Publication of JPS62238367A publication Critical patent/JPS62238367A/ja
Publication of JPH0532471B2 publication Critical patent/JPH0532471B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP7907486A 1986-04-08 1986-04-08 Ｃｖｄ薄膜形成装置 Granted JPS62238367A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7907486A JPS62238367A (ja) 1986-04-08 1986-04-08 Ｃｖｄ薄膜形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7907486A JPS62238367A (ja) 1986-04-08 1986-04-08 Ｃｖｄ薄膜形成装置

Publications (2)

Publication Number Publication Date
JPS62238367A JPS62238367A (ja) 1987-10-19
JPH0532471B2 true JPH0532471B2 (cs) 1993-05-17

Family

ID=13679741

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7907486A Granted JPS62238367A (ja) 1986-04-08 1986-04-08 Ｃｖｄ薄膜形成装置

Country Status (1)

Country Link
JP (1) JPS62238367A (cs)

Also Published As

Publication number Publication date
JPS62238367A (ja) 1987-10-19

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