JPH0528769Y2 - - Google Patents
Info
- Publication number
- JPH0528769Y2 JPH0528769Y2 JP1985108517U JP10851785U JPH0528769Y2 JP H0528769 Y2 JPH0528769 Y2 JP H0528769Y2 JP 1985108517 U JP1985108517 U JP 1985108517U JP 10851785 U JP10851785 U JP 10851785U JP H0528769 Y2 JPH0528769 Y2 JP H0528769Y2
- Authority
- JP
- Japan
- Prior art keywords
- probes
- resistance
- inclination
- contact
- measuring device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Measuring Leads Or Probes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985108517U JPH0528769Y2 (OSRAM) | 1985-07-16 | 1985-07-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985108517U JPH0528769Y2 (OSRAM) | 1985-07-16 | 1985-07-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6217130U JPS6217130U (OSRAM) | 1987-02-02 |
| JPH0528769Y2 true JPH0528769Y2 (OSRAM) | 1993-07-23 |
Family
ID=30985788
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985108517U Expired - Lifetime JPH0528769Y2 (OSRAM) | 1985-07-16 | 1985-07-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0528769Y2 (OSRAM) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4981011B2 (ja) * | 2008-11-04 | 2012-07-18 | 新光電気工業株式会社 | 電気特性測定用プローブ及びその製造方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5560869A (en) * | 1978-10-31 | 1980-05-08 | Mitsubishi Electric Corp | Device for measuring spreading resistance |
-
1985
- 1985-07-16 JP JP1985108517U patent/JPH0528769Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6217130U (OSRAM) | 1987-02-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US3826984A (en) | Measuring device for the dynamic measurement of semiconductor parameters and method of making such a device | |
| JPH0453267B2 (OSRAM) | ||
| CN114096837B (zh) | 细胞电位测定装置 | |
| JPH0528769Y2 (OSRAM) | ||
| US5945832A (en) | Structure and method of measuring electrical characteristics of a molecule | |
| JPH01150862A (ja) | プローブカード | |
| JPS6242539A (ja) | 化学感応性半導体装置及びその製造方法 | |
| JPH01211936A (ja) | 半導体ウェーハの電気的特性測定用プローブ針 | |
| JPH01219566A (ja) | プローブ・カード | |
| JP4586646B2 (ja) | コンタクト抵抗評価方法及びコンタクト抵抗評価用構造体 | |
| JP2622589B2 (ja) | 電気化学測定用微小電極セルおよびその製造方法 | |
| JPS63292071A (ja) | 半導体加速度センサの製造方法 | |
| JPS622458B2 (OSRAM) | ||
| JPH0926436A (ja) | 電子素子評価装置 | |
| KR102091722B1 (ko) | 심도-에칭된 멀티포인트 프로브 | |
| JPS6267880A (ja) | 半導体装置の製造方法 | |
| JP2698647B2 (ja) | 電気化学式センサ | |
| JP2012251921A (ja) | 電気化学センサおよび電気化学センサの製造方法 | |
| JP2001013163A (ja) | コンタクトプローブ及びコンタクトピンの研磨方法 | |
| JPH0345178Y2 (OSRAM) | ||
| JPS61147544A (ja) | 電気特性測定用ステ−ジ | |
| JPH01150863A (ja) | プローブカード | |
| JP2001021586A (ja) | コンタクトプローブ及びプローブ装置 | |
| JPS6367961U (OSRAM) | ||
| KR20060100874A (ko) | 마이크로 채널 구조를 갖는 가스센서 |