JPH0527835B2 - - Google Patents

Info

Publication number
JPH0527835B2
JPH0527835B2 JP20593284A JP20593284A JPH0527835B2 JP H0527835 B2 JPH0527835 B2 JP H0527835B2 JP 20593284 A JP20593284 A JP 20593284A JP 20593284 A JP20593284 A JP 20593284A JP H0527835 B2 JPH0527835 B2 JP H0527835B2
Authority
JP
Japan
Prior art keywords
ion beam
pattern
beam diameter
current
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP20593284A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6183989A (ja
Inventor
Susumu Asata
Katsumi Mori
Shinji Matsui
Kazuo Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP20593284A priority Critical patent/JPS6183989A/ja
Publication of JPS6183989A publication Critical patent/JPS6183989A/ja
Publication of JPH0527835B2 publication Critical patent/JPH0527835B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Radiation (AREA)
JP20593284A 1984-10-01 1984-10-01 イオンビ−ム径測定方法 Granted JPS6183989A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20593284A JPS6183989A (ja) 1984-10-01 1984-10-01 イオンビ−ム径測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20593284A JPS6183989A (ja) 1984-10-01 1984-10-01 イオンビ−ム径測定方法

Publications (2)

Publication Number Publication Date
JPS6183989A JPS6183989A (ja) 1986-04-28
JPH0527835B2 true JPH0527835B2 (enrdf_load_stackoverflow) 1993-04-22

Family

ID=16515118

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20593284A Granted JPS6183989A (ja) 1984-10-01 1984-10-01 イオンビ−ム径測定方法

Country Status (1)

Country Link
JP (1) JPS6183989A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4522267B2 (ja) * 2005-01-11 2010-08-11 日本電子株式会社 荷電粒子ビームの評価方法及び走査方法並びに荷電粒子ビーム装置

Also Published As

Publication number Publication date
JPS6183989A (ja) 1986-04-28

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