JPH0527834B2 - - Google Patents

Info

Publication number
JPH0527834B2
JPH0527834B2 JP20091984A JP20091984A JPH0527834B2 JP H0527834 B2 JPH0527834 B2 JP H0527834B2 JP 20091984 A JP20091984 A JP 20091984A JP 20091984 A JP20091984 A JP 20091984A JP H0527834 B2 JPH0527834 B2 JP H0527834B2
Authority
JP
Japan
Prior art keywords
ion beam
beam diameter
current
detector
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP20091984A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6177784A (ja
Inventor
Susumu Asata
Katsumi Mori
Shinji Matsui
Kazuo Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP20091984A priority Critical patent/JPS6177784A/ja
Publication of JPS6177784A publication Critical patent/JPS6177784A/ja
Publication of JPH0527834B2 publication Critical patent/JPH0527834B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Measurement Of Radiation (AREA)
JP20091984A 1984-09-26 1984-09-26 イオンビ−ム径測定方法 Granted JPS6177784A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20091984A JPS6177784A (ja) 1984-09-26 1984-09-26 イオンビ−ム径測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20091984A JPS6177784A (ja) 1984-09-26 1984-09-26 イオンビ−ム径測定方法

Publications (2)

Publication Number Publication Date
JPS6177784A JPS6177784A (ja) 1986-04-21
JPH0527834B2 true JPH0527834B2 (enrdf_load_stackoverflow) 1993-04-22

Family

ID=16432452

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20091984A Granted JPS6177784A (ja) 1984-09-26 1984-09-26 イオンビ−ム径測定方法

Country Status (1)

Country Link
JP (1) JPS6177784A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6177784A (ja) 1986-04-21

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