JPS6177784A - イオンビ−ム径測定方法 - Google Patents

イオンビ−ム径測定方法

Info

Publication number
JPS6177784A
JPS6177784A JP20091984A JP20091984A JPS6177784A JP S6177784 A JPS6177784 A JP S6177784A JP 20091984 A JP20091984 A JP 20091984A JP 20091984 A JP20091984 A JP 20091984A JP S6177784 A JPS6177784 A JP S6177784A
Authority
JP
Japan
Prior art keywords
ion beam
beam diameter
blanking
pattern
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20091984A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0527834B2 (enrdf_load_stackoverflow
Inventor
Susumu Asata
麻多　進
Katsumi Mori
克己 森
Shinji Matsui
真二 松井
Kazuo Nakamura
和夫 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP20091984A priority Critical patent/JPS6177784A/ja
Publication of JPS6177784A publication Critical patent/JPS6177784A/ja
Publication of JPH0527834B2 publication Critical patent/JPH0527834B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Measurement Of Radiation (AREA)
JP20091984A 1984-09-26 1984-09-26 イオンビ−ム径測定方法 Granted JPS6177784A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20091984A JPS6177784A (ja) 1984-09-26 1984-09-26 イオンビ−ム径測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20091984A JPS6177784A (ja) 1984-09-26 1984-09-26 イオンビ−ム径測定方法

Publications (2)

Publication Number Publication Date
JPS6177784A true JPS6177784A (ja) 1986-04-21
JPH0527834B2 JPH0527834B2 (enrdf_load_stackoverflow) 1993-04-22

Family

ID=16432452

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20091984A Granted JPS6177784A (ja) 1984-09-26 1984-09-26 イオンビ−ム径測定方法

Country Status (1)

Country Link
JP (1) JPS6177784A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0527834B2 (enrdf_load_stackoverflow) 1993-04-22

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