JPS6183989A - イオンビ−ム径測定方法 - Google Patents
イオンビ−ム径測定方法Info
- Publication number
- JPS6183989A JPS6183989A JP20593284A JP20593284A JPS6183989A JP S6183989 A JPS6183989 A JP S6183989A JP 20593284 A JP20593284 A JP 20593284A JP 20593284 A JP20593284 A JP 20593284A JP S6183989 A JPS6183989 A JP S6183989A
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- pattern
- current
- beam diameter
- value
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010884 ion-beam technique Methods 0.000 title claims abstract description 58
- 238000000034 method Methods 0.000 title abstract description 7
- 238000005259 measurement Methods 0.000 claims abstract description 15
- 238000005530 etching Methods 0.000 claims abstract description 11
- 238000000691 measurement method Methods 0.000 claims description 7
- 238000001514 detection method Methods 0.000 abstract description 6
- 230000000694 effects Effects 0.000 abstract description 5
- 238000011156 evaluation Methods 0.000 abstract description 5
- 238000010586 diagram Methods 0.000 description 6
- 238000000605 extraction Methods 0.000 description 2
- 210000003746 feather Anatomy 0.000 description 2
- 101000905241 Mus musculus Heart- and neural crest derivatives-expressed protein 1 Proteins 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000004033 diameter control Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
Landscapes
- Measurement Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20593284A JPS6183989A (ja) | 1984-10-01 | 1984-10-01 | イオンビ−ム径測定方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20593284A JPS6183989A (ja) | 1984-10-01 | 1984-10-01 | イオンビ−ム径測定方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6183989A true JPS6183989A (ja) | 1986-04-28 |
| JPH0527835B2 JPH0527835B2 (enrdf_load_stackoverflow) | 1993-04-22 |
Family
ID=16515118
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20593284A Granted JPS6183989A (ja) | 1984-10-01 | 1984-10-01 | イオンビ−ム径測定方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6183989A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006194618A (ja) * | 2005-01-11 | 2006-07-27 | Jeol Ltd | 荷電粒子ビームの評価方法及び走査方法並びに荷電粒子ビーム装置 |
-
1984
- 1984-10-01 JP JP20593284A patent/JPS6183989A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006194618A (ja) * | 2005-01-11 | 2006-07-27 | Jeol Ltd | 荷電粒子ビームの評価方法及び走査方法並びに荷電粒子ビーム装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0527835B2 (enrdf_load_stackoverflow) | 1993-04-22 |
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