JPH0527485Y2 - - Google Patents
Info
- Publication number
- JPH0527485Y2 JPH0527485Y2 JP278888U JP278888U JPH0527485Y2 JP H0527485 Y2 JPH0527485 Y2 JP H0527485Y2 JP 278888 U JP278888 U JP 278888U JP 278888 U JP278888 U JP 278888U JP H0527485 Y2 JPH0527485 Y2 JP H0527485Y2
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- spacer
- support
- thin film
- carbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000463 material Substances 0.000 claims description 14
- 125000006850 spacer group Chemical group 0.000 claims description 13
- 239000010409 thin film Substances 0.000 claims description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 6
- 229910052799 carbon Inorganic materials 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 claims 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 5
- 229910052750 molybdenum Inorganic materials 0.000 description 5
- 239000011733 molybdenum Substances 0.000 description 5
- 238000007740 vapor deposition Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 150000001721 carbon Chemical class 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP278888U JPH0527485Y2 (en, 2012) | 1988-01-13 | 1988-01-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP278888U JPH0527485Y2 (en, 2012) | 1988-01-13 | 1988-01-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01110256U JPH01110256U (en, 2012) | 1989-07-25 |
| JPH0527485Y2 true JPH0527485Y2 (en, 2012) | 1993-07-13 |
Family
ID=31506636
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP278888U Expired - Lifetime JPH0527485Y2 (en, 2012) | 1988-01-13 | 1988-01-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0527485Y2 (en, 2012) |
-
1988
- 1988-01-13 JP JP278888U patent/JPH0527485Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01110256U (en, 2012) | 1989-07-25 |
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