JPH0527455B2 - - Google Patents

Info

Publication number
JPH0527455B2
JPH0527455B2 JP61135579A JP13557986A JPH0527455B2 JP H0527455 B2 JPH0527455 B2 JP H0527455B2 JP 61135579 A JP61135579 A JP 61135579A JP 13557986 A JP13557986 A JP 13557986A JP H0527455 B2 JPH0527455 B2 JP H0527455B2
Authority
JP
Japan
Prior art keywords
sheet
discharge electrode
plasma processing
processing apparatus
drum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP61135579A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62294437A (ja
Inventor
Motoyasu Koyama
Hideaki Teraoka
Takao Akagi
Shinji Yamaguchi
Itsuki Sakamoto
Akira Nanba
Isao Okagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kuraray Co Ltd
Original Assignee
Kuraray Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kuraray Co Ltd filed Critical Kuraray Co Ltd
Priority to JP13557986A priority Critical patent/JPS62294437A/ja
Priority to KR870004997A priority patent/KR880000215A/ko
Priority to US07/058,858 priority patent/US4803332A/en
Priority to CN87104097A priority patent/CN1015614B/zh
Priority to EP87108331A priority patent/EP0249198B1/en
Priority to DE87108331T priority patent/DE3788160T2/de
Publication of JPS62294437A publication Critical patent/JPS62294437A/ja
Publication of JPH0527455B2 publication Critical patent/JPH0527455B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Treatment Of Fiber Materials (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
JP13557986A 1986-06-10 1986-06-11 シ−ト状物のプラズマ処理装置 Granted JPS62294437A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP13557986A JPS62294437A (ja) 1986-06-11 1986-06-11 シ−ト状物のプラズマ処理装置
KR870004997A KR880000215A (ko) 1986-06-10 1987-05-20 시이트(sheet)상 물체의 플라즈마 처리장치
US07/058,858 US4803332A (en) 1986-06-10 1987-06-05 Apparatus for plasma treatment of a sheet-like structure
CN87104097A CN1015614B (zh) 1986-06-10 1987-06-09 薄状物等离子体处理装置
EP87108331A EP0249198B1 (en) 1986-06-10 1987-06-10 Plasma treating apparatus
DE87108331T DE3788160T2 (de) 1986-06-10 1987-06-10 Plasmabehandlungsvorrichtung.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13557986A JPS62294437A (ja) 1986-06-11 1986-06-11 シ−ト状物のプラズマ処理装置

Publications (2)

Publication Number Publication Date
JPS62294437A JPS62294437A (ja) 1987-12-21
JPH0527455B2 true JPH0527455B2 (enrdf_load_stackoverflow) 1993-04-21

Family

ID=15155114

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13557986A Granted JPS62294437A (ja) 1986-06-10 1986-06-11 シ−ト状物のプラズマ処理装置

Country Status (1)

Country Link
JP (1) JPS62294437A (enrdf_load_stackoverflow)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57195737A (en) * 1981-05-29 1982-12-01 Shin Etsu Chem Co Ltd Apparatus for vacuum treatment
JPS5833009A (ja) * 1981-08-20 1983-02-26 Babcock Hitachi Kk 触媒燃焼装置
JPS58163432A (ja) * 1982-03-24 1983-09-28 Fujitsu Ltd プラズマ化学気相成長装置
JPS60226533A (ja) * 1984-04-25 1985-11-11 Hitachi Ltd 連続式プラズマ処理装置

Also Published As

Publication number Publication date
JPS62294437A (ja) 1987-12-21

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees