JPH0443101B2 - - Google Patents

Info

Publication number
JPH0443101B2
JPH0443101B2 JP17191087A JP17191087A JPH0443101B2 JP H0443101 B2 JPH0443101 B2 JP H0443101B2 JP 17191087 A JP17191087 A JP 17191087A JP 17191087 A JP17191087 A JP 17191087A JP H0443101 B2 JPH0443101 B2 JP H0443101B2
Authority
JP
Japan
Prior art keywords
sheet
plasma processing
discharge electrode
electrode
discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP17191087A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6414251A (en
Inventor
Motoyasu Koyama
Hideaki Teraoka
Takao Akagi
Itsuki Sakamoto
Shinji Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kuraray Co Ltd
Original Assignee
Kuraray Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kuraray Co Ltd filed Critical Kuraray Co Ltd
Priority to JP17191087A priority Critical patent/JPS6414251A/ja
Publication of JPS6414251A publication Critical patent/JPS6414251A/ja
Publication of JPH0443101B2 publication Critical patent/JPH0443101B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Treatments Of Macromolecular Shaped Articles (AREA)
JP17191087A 1987-07-08 1987-07-08 Apparatus for low-temperature plasma treatment of sheet Granted JPS6414251A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17191087A JPS6414251A (en) 1987-07-08 1987-07-08 Apparatus for low-temperature plasma treatment of sheet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17191087A JPS6414251A (en) 1987-07-08 1987-07-08 Apparatus for low-temperature plasma treatment of sheet

Publications (2)

Publication Number Publication Date
JPS6414251A JPS6414251A (en) 1989-01-18
JPH0443101B2 true JPH0443101B2 (enrdf_load_stackoverflow) 1992-07-15

Family

ID=15932092

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17191087A Granted JPS6414251A (en) 1987-07-08 1987-07-08 Apparatus for low-temperature plasma treatment of sheet

Country Status (1)

Country Link
JP (1) JPS6414251A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2763778A1 (fr) * 1997-05-21 1998-11-27 Sunnen Technologies Procede et dispositif de production d'un plasma hors d'equilibre
US7013983B2 (en) 2003-06-18 2006-03-21 Komatsu Ltd. Blade mounting structure of bulldozer

Also Published As

Publication number Publication date
JPS6414251A (en) 1989-01-18

Similar Documents

Publication Publication Date Title
EP0249198B1 (en) Plasma treating apparatus
JP5324596B2 (ja) 巻取式真空処理装置
JP4015210B2 (ja) オゾン発生装置
AU631712B2 (en) Rotating cylindrical magnetron structure for large area coating
KR100898141B1 (ko) 파이프 음극을 갖는 스퍼터 장치 및 스퍼터 장치의작동방법
JP3585578B2 (ja) プラズマ処理装置
EP0630087B1 (en) Apparatus for allowing web-like material to be subjected to vacuum glow-discharging treatment and method of conducting vacuum glow-discharging treatment
US6429595B1 (en) Multi-mode treater with internal air cooling system
US2446548A (en) Contact roll construction
JPS62136596A (ja) 金属ウエブへの連続電解処理装置
CN109576665B (zh) 一种离子源、镀膜装置以及镀膜方法
JPH0443101B2 (enrdf_load_stackoverflow)
JPH0443102B2 (enrdf_load_stackoverflow)
JPH0527455B2 (enrdf_load_stackoverflow)
JP4601379B2 (ja) 圧力勾配型イオンプレーティング式成膜装置
JPH0475778B2 (enrdf_load_stackoverflow)
JPH0475776B2 (enrdf_load_stackoverflow)
JPH0357146B2 (enrdf_load_stackoverflow)
JPH043771B2 (enrdf_load_stackoverflow)
CN220543832U (zh) 一种离子源设备和镀膜系统
CN215935127U (zh) 感应发热辊装置
JPS631443A (ja) シ−ト状物のプラズマ処理装置
JP2020152957A (ja) 長尺フィルムの表面処理装置
JPS61118937A (ja) イオン源
WO2007083608A1 (ja) スパッタ装置及びスパッタ方法

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees