JPH0357146B2 - - Google Patents

Info

Publication number
JPH0357146B2
JPH0357146B2 JP15016686A JP15016686A JPH0357146B2 JP H0357146 B2 JPH0357146 B2 JP H0357146B2 JP 15016686 A JP15016686 A JP 15016686A JP 15016686 A JP15016686 A JP 15016686A JP H0357146 B2 JPH0357146 B2 JP H0357146B2
Authority
JP
Japan
Prior art keywords
internal space
vacuum container
bearing box
sheet
plasma processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15016686A
Other languages
English (en)
Japanese (ja)
Other versions
JPS636030A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15016686A priority Critical patent/JPS636030A/ja
Publication of JPS636030A publication Critical patent/JPS636030A/ja
Publication of JPH0357146B2 publication Critical patent/JPH0357146B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/03—Pressure vessels, or vacuum vessels, having closure members or seals specially adapted therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP15016686A 1986-06-26 1986-06-26 シ−ト状物のプラズマ処理装置 Granted JPS636030A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15016686A JPS636030A (ja) 1986-06-26 1986-06-26 シ−ト状物のプラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15016686A JPS636030A (ja) 1986-06-26 1986-06-26 シ−ト状物のプラズマ処理装置

Publications (2)

Publication Number Publication Date
JPS636030A JPS636030A (ja) 1988-01-12
JPH0357146B2 true JPH0357146B2 (enrdf_load_stackoverflow) 1991-08-30

Family

ID=15490948

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15016686A Granted JPS636030A (ja) 1986-06-26 1986-06-26 シ−ト状物のプラズマ処理装置

Country Status (1)

Country Link
JP (1) JPS636030A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6110540A (en) * 1996-07-12 2000-08-29 The Boc Group, Inc. Plasma apparatus and method
CN102873886B (zh) * 2012-09-28 2014-12-03 江苏首义薄膜有限公司 封闭式恒温时效处理设备
CN106142532B (zh) * 2016-08-31 2018-11-16 南京苏曼等离子科技有限公司 一种大气常压低温等离子体农膜处理设备及其操作方法

Also Published As

Publication number Publication date
JPS636030A (ja) 1988-01-12

Similar Documents

Publication Publication Date Title
US5100527A (en) Rotating magnetron incorporating a removable cathode
US5529631A (en) Apparatus for the continuous surface treatment of sheet material
US4014779A (en) Sputtering apparatus
KR840000727B1 (ko) 연속 길이의 물질을 저온 플라스마와 함께 연속 처리하는 장치
KR100297358B1 (ko) 플라즈마에칭장치
US5849162A (en) Sputtering device and method for reactive for reactive sputtering
JP3073627B2 (ja) 熱処理装置
CN1015614B (zh) 薄状物等离子体处理装置
JPH0357146B2 (enrdf_load_stackoverflow)
JPS62136596A (ja) 金属ウエブへの連続電解処理装置
JPS6332880B2 (enrdf_load_stackoverflow)
US3835291A (en) Electron beam welding machine with split seal means
KR100191949B1 (ko) 분위기 열처리로 출입구의 밀봉장치
CA1077437A (en) Sputtering apparatus
JPH0527455B2 (enrdf_load_stackoverflow)
JPH0443101B2 (enrdf_load_stackoverflow)
JPH043771B2 (enrdf_load_stackoverflow)
CN112768106A (zh) 辐照实验装置及其应用方法
US3143594A (en) Demountable multiple stage ultra-high vacuum system
US3060113A (en) Apparatus for liquid processing of strip-like material
US3971937A (en) Radiography apparatus for forming an electrostatic latent image of a body to be examined by the ionization of gas
US3072392A (en) Vacuum furnace
JPS631443A (ja) シ−ト状物のプラズマ処理装置
JPS62289233A (ja) シ−ト状物のプラズマ処理装置
JP2647513B2 (ja) 連続真空蒸着装置

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees