JPS636030A - シ−ト状物のプラズマ処理装置 - Google Patents

シ−ト状物のプラズマ処理装置

Info

Publication number
JPS636030A
JPS636030A JP15016686A JP15016686A JPS636030A JP S636030 A JPS636030 A JP S636030A JP 15016686 A JP15016686 A JP 15016686A JP 15016686 A JP15016686 A JP 15016686A JP S636030 A JPS636030 A JP S636030A
Authority
JP
Japan
Prior art keywords
vacuum container
plasma processing
bearing box
internal space
sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15016686A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0357146B2 (enrdf_load_stackoverflow
Inventor
Motoyasu Koyama
小山　元靖
Hideaki Teraoka
寺岡　英朗
Takao Akagi
赤木　孝夫
Shinji Yamaguchi
新司 山口
Takashi Sakamoto
隆志 坂本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kuraray Co Ltd
Original Assignee
Kuraray Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kuraray Co Ltd filed Critical Kuraray Co Ltd
Priority to JP15016686A priority Critical patent/JPS636030A/ja
Publication of JPS636030A publication Critical patent/JPS636030A/ja
Publication of JPH0357146B2 publication Critical patent/JPH0357146B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/03—Pressure vessels, or vacuum vessels, having closure members or seals specially adapted therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP15016686A 1986-06-26 1986-06-26 シ−ト状物のプラズマ処理装置 Granted JPS636030A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15016686A JPS636030A (ja) 1986-06-26 1986-06-26 シ−ト状物のプラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15016686A JPS636030A (ja) 1986-06-26 1986-06-26 シ−ト状物のプラズマ処理装置

Publications (2)

Publication Number Publication Date
JPS636030A true JPS636030A (ja) 1988-01-12
JPH0357146B2 JPH0357146B2 (enrdf_load_stackoverflow) 1991-08-30

Family

ID=15490948

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15016686A Granted JPS636030A (ja) 1986-06-26 1986-06-26 シ−ト状物のプラズマ処理装置

Country Status (1)

Country Link
JP (1) JPS636030A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0818801A3 (en) * 1996-07-12 1998-05-13 The Boc Group, Inc. Plasma treating apparatus
CN102873886A (zh) * 2012-09-28 2013-01-16 江苏首义薄膜有限公司 封闭式恒温时效处理设备
CN106142532A (zh) * 2016-08-31 2016-11-23 南京苏曼等离子科技有限公司 一种大气常压低温等离子体农膜处理设备及其操作方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0818801A3 (en) * 1996-07-12 1998-05-13 The Boc Group, Inc. Plasma treating apparatus
US6110540A (en) * 1996-07-12 2000-08-29 The Boc Group, Inc. Plasma apparatus and method
CN102873886A (zh) * 2012-09-28 2013-01-16 江苏首义薄膜有限公司 封闭式恒温时效处理设备
CN102873886B (zh) * 2012-09-28 2014-12-03 江苏首义薄膜有限公司 封闭式恒温时效处理设备
CN106142532A (zh) * 2016-08-31 2016-11-23 南京苏曼等离子科技有限公司 一种大气常压低温等离子体农膜处理设备及其操作方法

Also Published As

Publication number Publication date
JPH0357146B2 (enrdf_load_stackoverflow) 1991-08-30

Similar Documents

Publication Publication Date Title
US5529631A (en) Apparatus for the continuous surface treatment of sheet material
US5391855A (en) Apparatus for atmospheric plasma treatment of a sheet-like structure
KR840000727B1 (ko) 연속 길이의 물질을 저온 플라스마와 함께 연속 처리하는 장치
US5100527A (en) Rotating magnetron incorporating a removable cathode
EP2210321B1 (en) Atmospheric treater with roller confined discharge chamber
JP3115015B2 (ja) 縦型バッチ処理装置
US3068510A (en) Polymerizing method and apparatus
US4014779A (en) Sputtering apparatus
US5849162A (en) Sputtering device and method for reactive for reactive sputtering
JP3073627B2 (ja) 熱処理装置
US20040050685A1 (en) Method and device for atmospheric plasma processing
JPS636030A (ja) シ−ト状物のプラズマ処理装置
JP2000353698A (ja) 連続プラズマ表面処理方法及び装置
JPH0955372A (ja) プラズマ処理装置
KR100191949B1 (ko) 분위기 열처리로 출입구의 밀봉장치
JP4099264B2 (ja) プラズマ処理によるフィルムシートの表面改質装置
JPH043771B2 (enrdf_load_stackoverflow)
JPH0443101B2 (enrdf_load_stackoverflow)
EP0205917B1 (en) Sputtering apparatus
JPH09227705A (ja) ウェブの表面処理装置
JPH0527455B2 (enrdf_load_stackoverflow)
JP2647513B2 (ja) 連続真空蒸着装置
JPS62289233A (ja) シ−ト状物のプラズマ処理装置
JPH0443102B2 (enrdf_load_stackoverflow)
JPH0286120A (ja) 縦型熱処理装置

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees