JPH043771B2 - - Google Patents

Info

Publication number
JPH043771B2
JPH043771B2 JP61145055A JP14505586A JPH043771B2 JP H043771 B2 JPH043771 B2 JP H043771B2 JP 61145055 A JP61145055 A JP 61145055A JP 14505586 A JP14505586 A JP 14505586A JP H043771 B2 JPH043771 B2 JP H043771B2
Authority
JP
Japan
Prior art keywords
rotating shaft
vacuum container
vacuum
sheet
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61145055A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63329A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14505586A priority Critical patent/JPS63329A/ja
Publication of JPS63329A publication Critical patent/JPS63329A/ja
Publication of JPH043771B2 publication Critical patent/JPH043771B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP14505586A 1986-06-20 1986-06-20 シ−ト状物のプラズマ処理装置 Granted JPS63329A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14505586A JPS63329A (ja) 1986-06-20 1986-06-20 シ−ト状物のプラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14505586A JPS63329A (ja) 1986-06-20 1986-06-20 シ−ト状物のプラズマ処理装置

Publications (2)

Publication Number Publication Date
JPS63329A JPS63329A (ja) 1988-01-05
JPH043771B2 true JPH043771B2 (enrdf_load_stackoverflow) 1992-01-24

Family

ID=15376336

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14505586A Granted JPS63329A (ja) 1986-06-20 1986-06-20 シ−ト状物のプラズマ処理装置

Country Status (1)

Country Link
JP (1) JPS63329A (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60149441A (ja) * 1984-01-17 1985-08-06 Kuraray Co Ltd プラズマ処理方法
JPS60226533A (ja) * 1984-04-25 1985-11-11 Hitachi Ltd 連続式プラズマ処理装置

Also Published As

Publication number Publication date
JPS63329A (ja) 1988-01-05

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees