JPS63329A - シ−ト状物のプラズマ処理装置 - Google Patents

シ−ト状物のプラズマ処理装置

Info

Publication number
JPS63329A
JPS63329A JP14505586A JP14505586A JPS63329A JP S63329 A JPS63329 A JP S63329A JP 14505586 A JP14505586 A JP 14505586A JP 14505586 A JP14505586 A JP 14505586A JP S63329 A JPS63329 A JP S63329A
Authority
JP
Japan
Prior art keywords
rotating shaft
vacuum container
sheet
electrode
discharge electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14505586A
Other languages
English (en)
Japanese (ja)
Other versions
JPH043771B2 (enrdf_load_stackoverflow
Inventor
Motoyasu Koyama
小山　元靖
Hideaki Teraoka
寺岡　英朗
Takao Akagi
赤木　孝夫
Shinji Yamaguchi
新司 山口
Itsuki Sakamoto
逸樹 坂本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kuraray Co Ltd
Original Assignee
Kuraray Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kuraray Co Ltd filed Critical Kuraray Co Ltd
Priority to JP14505586A priority Critical patent/JPS63329A/ja
Publication of JPS63329A publication Critical patent/JPS63329A/ja
Publication of JPH043771B2 publication Critical patent/JPH043771B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP14505586A 1986-06-20 1986-06-20 シ−ト状物のプラズマ処理装置 Granted JPS63329A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14505586A JPS63329A (ja) 1986-06-20 1986-06-20 シ−ト状物のプラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14505586A JPS63329A (ja) 1986-06-20 1986-06-20 シ−ト状物のプラズマ処理装置

Publications (2)

Publication Number Publication Date
JPS63329A true JPS63329A (ja) 1988-01-05
JPH043771B2 JPH043771B2 (enrdf_load_stackoverflow) 1992-01-24

Family

ID=15376336

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14505586A Granted JPS63329A (ja) 1986-06-20 1986-06-20 シ−ト状物のプラズマ処理装置

Country Status (1)

Country Link
JP (1) JPS63329A (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60149441A (ja) * 1984-01-17 1985-08-06 Kuraray Co Ltd プラズマ処理方法
JPS60226533A (ja) * 1984-04-25 1985-11-11 Hitachi Ltd 連続式プラズマ処理装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60149441A (ja) * 1984-01-17 1985-08-06 Kuraray Co Ltd プラズマ処理方法
JPS60226533A (ja) * 1984-04-25 1985-11-11 Hitachi Ltd 連続式プラズマ処理装置

Also Published As

Publication number Publication date
JPH043771B2 (enrdf_load_stackoverflow) 1992-01-24

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Legal Events

Date Code Title Description
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