JPH0475777B2 - - Google Patents

Info

Publication number
JPH0475777B2
JPH0475777B2 JP61143773A JP14377386A JPH0475777B2 JP H0475777 B2 JPH0475777 B2 JP H0475777B2 JP 61143773 A JP61143773 A JP 61143773A JP 14377386 A JP14377386 A JP 14377386A JP H0475777 B2 JPH0475777 B2 JP H0475777B2
Authority
JP
Japan
Prior art keywords
vacuum container
rotating shaft
sheet
electrode
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61143773A
Other languages
English (en)
Japanese (ja)
Other versions
JPS631443A (ja
Inventor
Motoyasu Koyama
Hideaki Teraoka
Takao Akagi
Shinji Yamaguchi
Takashi Sakamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kuraray Co Ltd
Original Assignee
Kuraray Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kuraray Co Ltd filed Critical Kuraray Co Ltd
Priority to JP61143773A priority Critical patent/JPS631443A/ja
Publication of JPS631443A publication Critical patent/JPS631443A/ja
Publication of JPH0475777B2 publication Critical patent/JPH0475777B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)
  • Treatment Of Fiber Materials (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
JP61143773A 1986-06-19 1986-06-19 シ−ト状物のプラズマ処理装置 Granted JPS631443A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61143773A JPS631443A (ja) 1986-06-19 1986-06-19 シ−ト状物のプラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61143773A JPS631443A (ja) 1986-06-19 1986-06-19 シ−ト状物のプラズマ処理装置

Publications (2)

Publication Number Publication Date
JPS631443A JPS631443A (ja) 1988-01-06
JPH0475777B2 true JPH0475777B2 (enrdf_load_stackoverflow) 1992-12-01

Family

ID=15346683

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61143773A Granted JPS631443A (ja) 1986-06-19 1986-06-19 シ−ト状物のプラズマ処理装置

Country Status (1)

Country Link
JP (1) JPS631443A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS631443A (ja) 1988-01-06

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees