JPH0526755Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Application Field] The effects of this invention relate to a rotating substrate apparatus, particularly an apparatus for rotating a plurality of substrate holders within a chamber for sputtering, vacuum evaporation, dry etching, and the like.

[Prior Art] Conventionally, as shown in FIG. 4, in this type of substrate rotation device, a plurality of disc-shaped substrate holders a are arranged adjacently so that they can each rotate in the direction of arrow A about an axis b, and each A square substrate c is placed on a substrate holder a to perform sputtering and other operations.

[Problems to be solved by the invention] In various apparatuses having a substrate rotation device as described above, it is necessary to process a large substrate in a chamber with the smallest possible capacity in terms of vacuum pumping performance and effective use of space. is required.

However, in the conventional example, as shown in FIG. 4, a square substrate c with a diagonal length l is the maximum size that can be processed simultaneously, and if the substrate holder a is larger than this, the substrate holder a will come into contact with each other when rotating. This is because it becomes impossible to process. Therefore, in order to process a large-sized substrate, it is necessary to increase the distance between the axes b of adjacent substrate holders a, but this inevitably increases the capacity of the chamber.

The present invention has been made to solve these conventional problems, and aims to provide a substrate rotation device that can process large-sized substrates without increasing the capacity of the chamber.

[Means for Solving the Problems] As a means for solving the above problems, this invention provides a plurality of substrate holders that rotate around their axes adjacent to each other, and a rectangular shape on each substrate holder. In the substrate rotation device for mounting a substrate, the plurality of substrate holders are configured to rotate at a constant speed, and adjacent substrate holders rotate in opposite directions to each other, is characterized in that it is placed on the substrate holder such that one of the adjacent substrates is rotated approximately 45 degrees with respect to the other.

With this configuration, large-sized rectangular substrates can be processed without increasing the spacing between substrate holders.

[Example] This invention will be explained in more detail below with reference to the illustrated example.

Figure 1 shows an example of this invention.
Four disc-shaped substrate holders 1 to 4 are attached to each axis 1a.
They are arranged adjacent to each other so as to be rotatable around ~4a, and in this case, the adjacent ones do not rotate in the same direction, but in opposite directions. That is, in the illustrated example, the substrate holder 1 moves clockwise, the substrate holder 2 on the right and the substrate holder 3 on the front move counterclockwise, and the substrate holder 4 on the right in the front moves clockwise at the same speed. It is supposed to rotate. Further, as in the conventional case, each of the substrate holders 1 to 4 is supported by a rotary plate 5 as shown in FIG. 2, and is configured to rotate clockwise about its axis 5a.

A gear 5b rotated by a drive source (not shown) such as a motor is attached to the rotary plate 5, and the gears 1b to 4b attached to the substrate holders 1 to 4 are transmission gears. 6,
7 or only through the gear 6, so that each substrate holder rotates on its own axis in a predetermined direction as described above, and is also caused to revolve by the rotary plate 5.

Square substrates 8 to 11 are set on the substrate holders 1 to 4, and are placed and fixed such that one of the adjacent substrates is rotated approximately 45 degrees with respect to the other. ing.

In this case, even if the substrates 8 to 11 are rotated by the substrate holders 1 to 4, they do not come into contact with each other. As a result, even though the spacing between the substrate holders is the same as before, the diagonal length L of each substrate 8 to 11 is can be made larger than the diagonal length l of the conventional substrate. By the way, I was able to change L=300mm from L=250mm.

Note that although the film thickness distribution and other processing effects at the edges of the substrate are somewhat different from those at the center of the substrate, this hardly poses a problem except for special uses.

Figure 3 shows another embodiment of this invention.
Two substrate holders 21 to 26 are arranged adjacently in a ring shape, and as in the previous embodiment, the rotation directions of the adjacent substrate holders are opposite to each other.
The square substrates 27 to 32 set on these substrate holders are mounted and fixed such that one of the adjacent substrates is rotated approximately 45 degrees with respect to the other. In this embodiment as well, it is possible to process a larger substrate than the conventional method, as in the previous embodiment.

[Effects of the invention] As explained above, according to this invention, it is possible to set a substrate of a larger size than before without increasing the volume of the chamber in processing such as sputtering, and the size of the processed substrate can be reduced. It is possible to obtain great manufacturing advantages, such as making it possible to use a device that cannot be applied to the intended film deposition apparatus because of its slightly large size.

[Brief explanation of the drawing]

Fig. 1 is an explanatory diagram showing an embodiment of this invention, Fig. 2 is a cutaway perspective view of its main parts, Fig. 3 is an explanatory diagram showing another embodiment of this invention during rotation, and Fig. 4 is an explanatory diagram showing an embodiment of this invention. The figure is an explanatory diagram of a conventional example. 1 to 4... Substrate holder, 1a to 4a... Axis line, 5... Rotating plate, 6, 7... Gear, 8 to 11...
...Substrate, 21-26...Substrate holder, 27-3
2...Substrate.

Claims (1)

[Claims for Utility Model Registration] (1) In a substrate rotation device in which a plurality of substrate holders that rotate around an axis are provided adjacent to each other and a rectangular substrate is placed on each substrate holder, 1. A substrate rotation device, wherein all holders rotate at a constant speed, and adjacent substrate holders rotate in opposite directions. (2) The utility model registration characterized in that the rectangular substrates are placed on the substrate holder so that one of the adjacent substrates is rotated approximately 45 degrees with respect to the other. A substrate rotation device according to claim (1).