JPH0526735Y2 - - Google Patents

Info

Publication number
JPH0526735Y2
JPH0526735Y2 JP16852784U JP16852784U JPH0526735Y2 JP H0526735 Y2 JPH0526735 Y2 JP H0526735Y2 JP 16852784 U JP16852784 U JP 16852784U JP 16852784 U JP16852784 U JP 16852784U JP H0526735 Y2 JPH0526735 Y2 JP H0526735Y2
Authority
JP
Japan
Prior art keywords
lid
reaction chamber
negative pressure
recess
cover
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP16852784U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6185143U (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16852784U priority Critical patent/JPH0526735Y2/ja
Publication of JPS6185143U publication Critical patent/JPS6185143U/ja
Application granted granted Critical
Publication of JPH0526735Y2 publication Critical patent/JPH0526735Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP16852784U 1984-11-08 1984-11-08 Expired - Lifetime JPH0526735Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16852784U JPH0526735Y2 (en:Method) 1984-11-08 1984-11-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16852784U JPH0526735Y2 (en:Method) 1984-11-08 1984-11-08

Publications (2)

Publication Number Publication Date
JPS6185143U JPS6185143U (en:Method) 1986-06-04
JPH0526735Y2 true JPH0526735Y2 (en:Method) 1993-07-07

Family

ID=30726295

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16852784U Expired - Lifetime JPH0526735Y2 (en:Method) 1984-11-08 1984-11-08

Country Status (1)

Country Link
JP (1) JPH0526735Y2 (en:Method)

Also Published As

Publication number Publication date
JPS6185143U (en:Method) 1986-06-04

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