JPH0526542Y2 - - Google Patents

Info

Publication number
JPH0526542Y2
JPH0526542Y2 JP1984023489U JP2348984U JPH0526542Y2 JP H0526542 Y2 JPH0526542 Y2 JP H0526542Y2 JP 1984023489 U JP1984023489 U JP 1984023489U JP 2348984 U JP2348984 U JP 2348984U JP H0526542 Y2 JPH0526542 Y2 JP H0526542Y2
Authority
JP
Japan
Prior art keywords
cassette
piece
grounding
detection
detection piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1984023489U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60135674U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2348984U priority Critical patent/JPS60135674U/ja
Publication of JPS60135674U publication Critical patent/JPS60135674U/ja
Application granted granted Critical
Publication of JPH0526542Y2 publication Critical patent/JPH0526542Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Electron Beam Exposure (AREA)
JP2348984U 1984-02-21 1984-02-21 電子ビ−ム描画用試料の導通検査機構 Granted JPS60135674U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2348984U JPS60135674U (ja) 1984-02-21 1984-02-21 電子ビ−ム描画用試料の導通検査機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2348984U JPS60135674U (ja) 1984-02-21 1984-02-21 電子ビ−ム描画用試料の導通検査機構

Publications (2)

Publication Number Publication Date
JPS60135674U JPS60135674U (ja) 1985-09-09
JPH0526542Y2 true JPH0526542Y2 (enrdf_load_stackoverflow) 1993-07-05

Family

ID=30516771

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2348984U Granted JPS60135674U (ja) 1984-02-21 1984-02-21 電子ビ−ム描画用試料の導通検査機構

Country Status (1)

Country Link
JP (1) JPS60135674U (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5651348U (enrdf_load_stackoverflow) * 1979-09-28 1981-05-07

Also Published As

Publication number Publication date
JPS60135674U (ja) 1985-09-09

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