JPS60135674U - 電子ビ−ム描画用試料の導通検査機構 - Google Patents

電子ビ−ム描画用試料の導通検査機構

Info

Publication number
JPS60135674U
JPS60135674U JP2348984U JP2348984U JPS60135674U JP S60135674 U JPS60135674 U JP S60135674U JP 2348984 U JP2348984 U JP 2348984U JP 2348984 U JP2348984 U JP 2348984U JP S60135674 U JPS60135674 U JP S60135674U
Authority
JP
Japan
Prior art keywords
electron beam
grounding
cassette
sample
piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2348984U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0526542Y2 (enrdf_load_stackoverflow
Inventor
沼賀　拓興
岩瀬　昭
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Machine Co Ltd
Original Assignee
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Priority to JP2348984U priority Critical patent/JPS60135674U/ja
Publication of JPS60135674U publication Critical patent/JPS60135674U/ja
Application granted granted Critical
Publication of JPH0526542Y2 publication Critical patent/JPH0526542Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
JP2348984U 1984-02-21 1984-02-21 電子ビ−ム描画用試料の導通検査機構 Granted JPS60135674U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2348984U JPS60135674U (ja) 1984-02-21 1984-02-21 電子ビ−ム描画用試料の導通検査機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2348984U JPS60135674U (ja) 1984-02-21 1984-02-21 電子ビ−ム描画用試料の導通検査機構

Publications (2)

Publication Number Publication Date
JPS60135674U true JPS60135674U (ja) 1985-09-09
JPH0526542Y2 JPH0526542Y2 (enrdf_load_stackoverflow) 1993-07-05

Family

ID=30516771

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2348984U Granted JPS60135674U (ja) 1984-02-21 1984-02-21 電子ビ−ム描画用試料の導通検査機構

Country Status (1)

Country Link
JP (1) JPS60135674U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5651348U (enrdf_load_stackoverflow) * 1979-09-28 1981-05-07

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5651348U (enrdf_load_stackoverflow) * 1979-09-28 1981-05-07

Also Published As

Publication number Publication date
JPH0526542Y2 (enrdf_load_stackoverflow) 1993-07-05

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