JPH0523633B2 - - Google Patents
Info
- Publication number
- JPH0523633B2 JPH0523633B2 JP61015413A JP1541386A JPH0523633B2 JP H0523633 B2 JPH0523633 B2 JP H0523633B2 JP 61015413 A JP61015413 A JP 61015413A JP 1541386 A JP1541386 A JP 1541386A JP H0523633 B2 JPH0523633 B2 JP H0523633B2
- Authority
- JP
- Japan
- Prior art keywords
- circuit board
- contact
- turntable
- photomask
- inspection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007689 inspection Methods 0.000 claims description 32
- 238000001514 detection method Methods 0.000 claims description 10
- 230000000007 visual effect Effects 0.000 claims description 3
- 238000012790 confirmation Methods 0.000 claims 1
- 238000012360 testing method Methods 0.000 description 12
- 239000003638 chemical reducing agent Substances 0.000 description 5
- 230000000630 rising effect Effects 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
Landscapes
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61015413A JPS62172270A (ja) | 1986-01-27 | 1986-01-27 | 回路基板検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61015413A JPS62172270A (ja) | 1986-01-27 | 1986-01-27 | 回路基板検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62172270A JPS62172270A (ja) | 1987-07-29 |
| JPH0523633B2 true JPH0523633B2 (enExample) | 1993-04-05 |
Family
ID=11888054
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61015413A Granted JPS62172270A (ja) | 1986-01-27 | 1986-01-27 | 回路基板検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62172270A (enExample) |
-
1986
- 1986-01-27 JP JP61015413A patent/JPS62172270A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62172270A (ja) | 1987-07-29 |
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