JPH0522387B2 - - Google Patents
Info
- Publication number
- JPH0522387B2 JPH0522387B2 JP59188402A JP18840284A JPH0522387B2 JP H0522387 B2 JPH0522387 B2 JP H0522387B2 JP 59188402 A JP59188402 A JP 59188402A JP 18840284 A JP18840284 A JP 18840284A JP H0522387 B2 JPH0522387 B2 JP H0522387B2
- Authority
- JP
- Japan
- Prior art keywords
- insulating film
- epitaxial layer
- active region
- interface
- selective
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Element Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18840284A JPS6165447A (ja) | 1984-09-07 | 1984-09-07 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18840284A JPS6165447A (ja) | 1984-09-07 | 1984-09-07 | 半導体装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6165447A JPS6165447A (ja) | 1986-04-04 |
| JPH0522387B2 true JPH0522387B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-03-29 |
Family
ID=16223013
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18840284A Granted JPS6165447A (ja) | 1984-09-07 | 1984-09-07 | 半導体装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6165447A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02137244A (ja) * | 1988-11-17 | 1990-05-25 | Nec Corp | 半導体装置の製造方法 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5179590A (ja) * | 1975-01-06 | 1976-07-10 | Hitachi Ltd | Handotaisochinoseizohoho |
| JPS56158446A (en) * | 1980-05-12 | 1981-12-07 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor integrated circuit |
-
1984
- 1984-09-07 JP JP18840284A patent/JPS6165447A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6165447A (ja) | 1986-04-04 |