JPH052103B2 - - Google Patents

Info

Publication number
JPH052103B2
JPH052103B2 JP60006701A JP670185A JPH052103B2 JP H052103 B2 JPH052103 B2 JP H052103B2 JP 60006701 A JP60006701 A JP 60006701A JP 670185 A JP670185 A JP 670185A JP H052103 B2 JPH052103 B2 JP H052103B2
Authority
JP
Japan
Prior art keywords
probe
converter
flaw detection
signal
frequency dividing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60006701A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61167859A (ja
Inventor
Chishio Koshimizu
Toshio Nonaka
Yasuo Hayakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Construction Machinery Co Ltd
Original Assignee
Hitachi Construction Machinery Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Construction Machinery Co Ltd filed Critical Hitachi Construction Machinery Co Ltd
Priority to JP60006701A priority Critical patent/JPS61167859A/ja
Publication of JPS61167859A publication Critical patent/JPS61167859A/ja
Publication of JPH052103B2 publication Critical patent/JPH052103B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/26—Arrangements for orientation or scanning by relative movement of the head and the sensor
    • G01N29/265—Arrangements for orientation or scanning by relative movement of the head and the sensor by moving the sensor relative to a stationary material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/26—Scanned objects
    • G01N2291/269—Various geometry objects
    • G01N2291/2697—Wafer or (micro)electronic parts

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
JP60006701A 1985-01-19 1985-01-19 自動探傷走査装置 Granted JPS61167859A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60006701A JPS61167859A (ja) 1985-01-19 1985-01-19 自動探傷走査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60006701A JPS61167859A (ja) 1985-01-19 1985-01-19 自動探傷走査装置

Publications (2)

Publication Number Publication Date
JPS61167859A JPS61167859A (ja) 1986-07-29
JPH052103B2 true JPH052103B2 (enrdf_load_stackoverflow) 1993-01-11

Family

ID=11645623

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60006701A Granted JPS61167859A (ja) 1985-01-19 1985-01-19 自動探傷走査装置

Country Status (1)

Country Link
JP (1) JPS61167859A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63133057A (ja) * 1986-11-26 1988-06-04 Hitachi Constr Mach Co Ltd 超音波探傷装置
JPS63133058A (ja) * 1986-11-26 1988-06-04 Hitachi Constr Mach Co Ltd 超音波探傷装置
JPH0833378B2 (ja) * 1987-01-12 1996-03-29 株式会社明電舎 セラミツク半導体基板の検査装置

Also Published As

Publication number Publication date
JPS61167859A (ja) 1986-07-29

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