JPH0520506B2 - - Google Patents

Info

Publication number
JPH0520506B2
JPH0520506B2 JP1224982A JP22498289A JPH0520506B2 JP H0520506 B2 JPH0520506 B2 JP H0520506B2 JP 1224982 A JP1224982 A JP 1224982A JP 22498289 A JP22498289 A JP 22498289A JP H0520506 B2 JPH0520506 B2 JP H0520506B2
Authority
JP
Japan
Prior art keywords
substrate
film forming
film
forming chamber
mist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1224982A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0390580A (ja
Inventor
Mizuho Imai
Mikio Sekiguchi
Nobuyasu Shiba
Hideyo Iida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taiyo Yuden Co Ltd
Original Assignee
Taiyo Yuden Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiyo Yuden Co Ltd filed Critical Taiyo Yuden Co Ltd
Priority to JP22498289A priority Critical patent/JPH0390580A/ja
Publication of JPH0390580A publication Critical patent/JPH0390580A/ja
Publication of JPH0520506B2 publication Critical patent/JPH0520506B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Non-Insulated Conductors (AREA)
  • Manufacturing Of Electric Cables (AREA)
  • Chemically Coating (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Photovoltaic Devices (AREA)
JP22498289A 1989-08-31 1989-08-31 霧化薄膜形成方法 Granted JPH0390580A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22498289A JPH0390580A (ja) 1989-08-31 1989-08-31 霧化薄膜形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22498289A JPH0390580A (ja) 1989-08-31 1989-08-31 霧化薄膜形成方法

Publications (2)

Publication Number Publication Date
JPH0390580A JPH0390580A (ja) 1991-04-16
JPH0520506B2 true JPH0520506B2 (enrdf_load_stackoverflow) 1993-03-19

Family

ID=16822249

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22498289A Granted JPH0390580A (ja) 1989-08-31 1989-08-31 霧化薄膜形成方法

Country Status (1)

Country Link
JP (1) JPH0390580A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5290382B2 (ja) * 2011-10-28 2013-09-18 シャープ株式会社 成膜装置
JP5927335B1 (ja) 2015-12-16 2016-06-01 株式会社タカラトミー 連結コマ発射装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58125613A (ja) * 1982-01-18 1983-07-26 Nippon Sheet Glass Co Ltd 酸化錫膜の形成方法
JPS6169962A (ja) * 1984-09-13 1986-04-10 Agency Of Ind Science & Technol 霧化薄膜作製装置

Also Published As

Publication number Publication date
JPH0390580A (ja) 1991-04-16

Similar Documents

Publication Publication Date Title
RU2194089C2 (ru) Способ получения покрытия из оксида олова на стекле
JP4716631B2 (ja) 基板上の光触媒被膜の製造方法
US5393563A (en) Formation of tin oxide films on glass substrates
KR960014038A (ko) 평면 도파관의 제조를 위한 에어로졸 방법
JPS6210943B2 (enrdf_load_stackoverflow)
TW201343585A (zh) 可減低化學強化時之彎曲之玻璃板
JP3214713B2 (ja) ガラスを被覆する方法
JPH03503067A (ja) 基板コーティング装置および方法
JPH0520506B2 (enrdf_load_stackoverflow)
JP4304391B2 (ja) 酸化錫膜とその製造方法および酸化錫膜の製造装置
US5009928A (en) Method for forming a transparent conductive metal oxide film
JPH0390579A (ja) 薄膜形成装置
JPS6169962A (ja) 霧化薄膜作製装置
JP2001015783A (ja) 酸化錫膜の製造方法および酸化錫膜の製造装置
JPS6214221B2 (enrdf_load_stackoverflow)
EP0437854B1 (en) Atomized thin film forming apparatus
JPH046796B2 (enrdf_load_stackoverflow)
JPH0745846Y2 (ja) 霧化薄膜形成装置
JPS613885A (ja) 霧化薄膜作製方法
JPH0778768A (ja) 薄膜形成装置及び方法
JP2003238205A (ja) 薄膜形成方法およびその方法で形成した薄膜を備える基体
JPH0247540B2 (enrdf_load_stackoverflow)
JPH0648685Y2 (ja) 霧化薄膜形成装置
JPH0698330B2 (ja) 霧化薄膜形成装置
JPS5945926A (ja) 基体に酸化錫膜を形成する方法