JPH0519766Y2 - - Google Patents
Info
- Publication number
- JPH0519766Y2 JPH0519766Y2 JP6624987U JP6624987U JPH0519766Y2 JP H0519766 Y2 JPH0519766 Y2 JP H0519766Y2 JP 6624987 U JP6624987 U JP 6624987U JP 6624987 U JP6624987 U JP 6624987U JP H0519766 Y2 JPH0519766 Y2 JP H0519766Y2
- Authority
- JP
- Japan
- Prior art keywords
- gap
- shaft
- measuring
- displacement sensor
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000006073 displacement reaction Methods 0.000 claims description 26
- 238000005259 measurement Methods 0.000 description 9
- 238000001514 detection method Methods 0.000 description 5
- 239000000523 sample Substances 0.000 description 5
- 238000009434 installation Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6624987U JPH0519766Y2 (US20090163788A1-20090625-C00002.png) | 1987-05-02 | 1987-05-02 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6624987U JPH0519766Y2 (US20090163788A1-20090625-C00002.png) | 1987-05-02 | 1987-05-02 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63175807U JPS63175807U (US20090163788A1-20090625-C00002.png) | 1988-11-15 |
JPH0519766Y2 true JPH0519766Y2 (US20090163788A1-20090625-C00002.png) | 1993-05-25 |
Family
ID=30904079
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6624987U Expired - Lifetime JPH0519766Y2 (US20090163788A1-20090625-C00002.png) | 1987-05-02 | 1987-05-02 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0519766Y2 (US20090163788A1-20090625-C00002.png) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4509588B2 (ja) * | 2004-01-30 | 2010-07-21 | 株式会社ミツトヨ | 段差・隙間測定装置 |
US9671421B2 (en) * | 2015-04-24 | 2017-06-06 | Horiba Stec, Co., Ltd. | Micro-position gap sensor assembly |
-
1987
- 1987-05-02 JP JP6624987U patent/JPH0519766Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS63175807U (US20090163788A1-20090625-C00002.png) | 1988-11-15 |
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