JPH0518908B2 - - Google Patents

Info

Publication number
JPH0518908B2
JPH0518908B2 JP57066603A JP6660382A JPH0518908B2 JP H0518908 B2 JPH0518908 B2 JP H0518908B2 JP 57066603 A JP57066603 A JP 57066603A JP 6660382 A JP6660382 A JP 6660382A JP H0518908 B2 JPH0518908 B2 JP H0518908B2
Authority
JP
Japan
Prior art keywords
cathode
sample
electrostatic chuck
dry etching
chuck mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57066603A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58185773A (ja
Inventor
Haruo Okano
Takashi Yamazaki
Yasuhiro Horiike
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP6660382A priority Critical patent/JPS58185773A/ja
Publication of JPS58185773A publication Critical patent/JPS58185773A/ja
Publication of JPH0518908B2 publication Critical patent/JPH0518908B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3435—Target holders (includes backing plates and endblocks)

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)
JP6660382A 1982-04-21 1982-04-21 ドライエツチング方法 Granted JPS58185773A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6660382A JPS58185773A (ja) 1982-04-21 1982-04-21 ドライエツチング方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6660382A JPS58185773A (ja) 1982-04-21 1982-04-21 ドライエツチング方法

Publications (2)

Publication Number Publication Date
JPS58185773A JPS58185773A (ja) 1983-10-29
JPH0518908B2 true JPH0518908B2 (esLanguage) 1993-03-15

Family

ID=13320646

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6660382A Granted JPS58185773A (ja) 1982-04-21 1982-04-21 ドライエツチング方法

Country Status (1)

Country Link
JP (1) JPS58185773A (esLanguage)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0670985B2 (ja) * 1989-09-27 1994-09-07 株式会社日立製作所 試料の温度制御方法及び装置
JPH0670986B2 (ja) * 1989-09-27 1994-09-07 株式会社日立製作所 真空処理装置の試料保持方法
JP2580791B2 (ja) * 1989-09-27 1997-02-12 株式会社日立製作所 真空処理装置
JPH04137529A (ja) * 1990-09-27 1992-05-12 Oki Electric Ind Co Ltd ドライプロセス装置
JP3375646B2 (ja) * 1991-05-31 2003-02-10 株式会社日立製作所 プラズマ処理装置
KR100463782B1 (ko) * 1995-09-20 2005-04-28 가부시끼가이샤 히다치 세이사꾸쇼 정전흡착전극및그제작방법

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55115047U (esLanguage) * 1979-02-06 1980-08-13
JPS5647574A (en) * 1979-09-28 1981-04-30 Toshiba Corp Plasma etching apparatus
JPS577935A (en) * 1980-06-19 1982-01-16 Fujitsu Ltd Method for dry etching
JPS5760074A (en) * 1980-09-30 1982-04-10 Fujitsu Ltd Dry etching method

Also Published As

Publication number Publication date
JPS58185773A (ja) 1983-10-29

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