JPH0518344Y2 - - Google Patents
Info
- Publication number
- JPH0518344Y2 JPH0518344Y2 JP6694586U JP6694586U JPH0518344Y2 JP H0518344 Y2 JPH0518344 Y2 JP H0518344Y2 JP 6694586 U JP6694586 U JP 6694586U JP 6694586 U JP6694586 U JP 6694586U JP H0518344 Y2 JPH0518344 Y2 JP H0518344Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- conveyor
- flat belt
- flat
- air blowing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 50
- 238000007664 blowing Methods 0.000 claims description 18
- 238000000034 method Methods 0.000 description 11
- 239000000919 ceramic Substances 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
Landscapes
- Intermediate Stations On Conveyors (AREA)
- Delivering By Means Of Belts And Rollers (AREA)
- Specific Conveyance Elements (AREA)
- Attitude Control For Articles On Conveyors (AREA)
- Registering Or Overturning Sheets (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6694586U JPH0518344Y2 (enrdf_load_stackoverflow) | 1986-05-06 | 1986-05-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6694586U JPH0518344Y2 (enrdf_load_stackoverflow) | 1986-05-06 | 1986-05-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62179254U JPS62179254U (enrdf_load_stackoverflow) | 1987-11-13 |
| JPH0518344Y2 true JPH0518344Y2 (enrdf_load_stackoverflow) | 1993-05-17 |
Family
ID=30905408
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6694586U Expired - Lifetime JPH0518344Y2 (enrdf_load_stackoverflow) | 1986-05-06 | 1986-05-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0518344Y2 (enrdf_load_stackoverflow) |
-
1986
- 1986-05-06 JP JP6694586U patent/JPH0518344Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62179254U (enrdf_load_stackoverflow) | 1987-11-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| WO2023035774A1 (zh) | 一种衬底输送机构 | |
| JPH09289241A (ja) | ウェーハ搬送装置 | |
| JP2000191334A5 (ja) | 板ガラスの搬送装置及び方法 | |
| JPH07107895A (ja) | クロワッサン生地の調心装置 | |
| JPH0518344Y2 (enrdf_load_stackoverflow) | ||
| JPH0549730U (ja) | シートの反転搬送装置 | |
| US3997065A (en) | Device for positioning substrate wafers | |
| CN212314830U (zh) | 一种条烟计数输送装置 | |
| JPH0680244A (ja) | 反転装置 | |
| JP2940515B2 (ja) | 搬送物の姿勢変更装置 | |
| KR870000859B1 (ko) | 슬라이드 파스너 배출장치 | |
| CN116068688A (zh) | 光学扩散膜预收缩机构 | |
| JPH1022364A (ja) | 搬送装置における吸着ハンド | |
| JPH09162264A (ja) | 基板搬送装置 | |
| JPS60213616A (ja) | 真空中における試料表裏反転装置 | |
| JPS6186305A (ja) | プレ−ト搬送装置 | |
| JPH07144747A (ja) | 容器整列装置 | |
| CN116885048B (zh) | 一种太阳能电池片在线装卸设备 | |
| JPH075049Y2 (ja) | 搬送装置 | |
| JPS593860Y2 (ja) | 反転装置 | |
| JPS61270843A (ja) | ウエハ位置合せ機構 | |
| KR100502247B1 (ko) | 기판반송장치 | |
| JPS602097Y2 (ja) | 板状物品の起立装置 | |
| JPH10245114A (ja) | ベルト式バキュームコンベア | |
| JPH038644Y2 (enrdf_load_stackoverflow) |