JPH0518277B2 - - Google Patents

Info

Publication number
JPH0518277B2
JPH0518277B2 JP59060165A JP6016584A JPH0518277B2 JP H0518277 B2 JPH0518277 B2 JP H0518277B2 JP 59060165 A JP59060165 A JP 59060165A JP 6016584 A JP6016584 A JP 6016584A JP H0518277 B2 JPH0518277 B2 JP H0518277B2
Authority
JP
Japan
Prior art keywords
electrode
semiconductor
film
conductive film
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP59060165A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6086875A (ja
Inventor
Shunpei Yamazaki
Kenji Ito
Satsuki Watabe
Susumu Nagayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP59060165A priority Critical patent/JPS6086875A/ja
Publication of JPS6086875A publication Critical patent/JPS6086875A/ja
Publication of JPH0518277B2 publication Critical patent/JPH0518277B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F19/00—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules
    • H10F19/30—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells
    • H10F19/31—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells having multiple laterally adjacent thin-film photovoltaic cells deposited on the same substrate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Drying Of Semiconductors (AREA)
  • Photovoltaic Devices (AREA)
JP59060165A 1984-03-28 1984-03-28 半導体装置作製方法 Granted JPS6086875A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59060165A JPS6086875A (ja) 1984-03-28 1984-03-28 半導体装置作製方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59060165A JPS6086875A (ja) 1984-03-28 1984-03-28 半導体装置作製方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP58194877A Division JPS6085574A (ja) 1983-10-18 1983-10-18 半導体装置作製方法

Publications (2)

Publication Number Publication Date
JPS6086875A JPS6086875A (ja) 1985-05-16
JPH0518277B2 true JPH0518277B2 (enrdf_load_stackoverflow) 1993-03-11

Family

ID=13134269

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59060165A Granted JPS6086875A (ja) 1984-03-28 1984-03-28 半導体装置作製方法

Country Status (1)

Country Link
JP (1) JPS6086875A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6086875A (ja) 1985-05-16

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees