JPH0518276B2 - - Google Patents

Info

Publication number
JPH0518276B2
JPH0518276B2 JP58232535A JP23253583A JPH0518276B2 JP H0518276 B2 JPH0518276 B2 JP H0518276B2 JP 58232535 A JP58232535 A JP 58232535A JP 23253583 A JP23253583 A JP 23253583A JP H0518276 B2 JPH0518276 B2 JP H0518276B2
Authority
JP
Japan
Prior art keywords
electrode
semiconductor
conductive film
film
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58232535A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60124880A (ja
Inventor
Shunpei Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP58232535A priority Critical patent/JPS60124880A/ja
Publication of JPS60124880A publication Critical patent/JPS60124880A/ja
Publication of JPH0518276B2 publication Critical patent/JPH0518276B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F19/00—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules
    • H10F19/30—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells
    • H10F19/31—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells having multiple laterally adjacent thin-film photovoltaic cells deposited on the same substrate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Photovoltaic Devices (AREA)
  • Light Receiving Elements (AREA)
JP58232535A 1983-12-09 1983-12-09 光電変換半導体装置作製方法 Granted JPS60124880A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58232535A JPS60124880A (ja) 1983-12-09 1983-12-09 光電変換半導体装置作製方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58232535A JPS60124880A (ja) 1983-12-09 1983-12-09 光電変換半導体装置作製方法

Publications (2)

Publication Number Publication Date
JPS60124880A JPS60124880A (ja) 1985-07-03
JPH0518276B2 true JPH0518276B2 (enrdf_load_stackoverflow) 1993-03-11

Family

ID=16940850

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58232535A Granted JPS60124880A (ja) 1983-12-09 1983-12-09 光電変換半導体装置作製方法

Country Status (1)

Country Link
JP (1) JPS60124880A (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60113478A (ja) * 1983-11-24 1985-06-19 Semiconductor Energy Lab Co Ltd 半導体装置用電極の作製方法
JPS60120577A (ja) * 1983-12-05 1985-06-28 Semiconductor Energy Lab Co Ltd 半導体装置用電極の作製方法

Also Published As

Publication number Publication date
JPS60124880A (ja) 1985-07-03

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