JPH0518275B2 - - Google Patents

Info

Publication number
JPH0518275B2
JPH0518275B2 JP58231010A JP23101083A JPH0518275B2 JP H0518275 B2 JPH0518275 B2 JP H0518275B2 JP 58231010 A JP58231010 A JP 58231010A JP 23101083 A JP23101083 A JP 23101083A JP H0518275 B2 JPH0518275 B2 JP H0518275B2
Authority
JP
Japan
Prior art keywords
electrode
semiconductor
film
insulating film
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58231010A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60123072A (ja
Inventor
Shunpei Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP58231010A priority Critical patent/JPS60123072A/ja
Publication of JPS60123072A publication Critical patent/JPS60123072A/ja
Publication of JPH0518275B2 publication Critical patent/JPH0518275B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F19/00—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules
    • H10F19/30—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells
    • H10F19/31—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells having multiple laterally adjacent thin-film photovoltaic cells deposited on the same substrate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Photovoltaic Devices (AREA)
  • Light Receiving Elements (AREA)
JP58231010A 1983-12-07 1983-12-07 半導体装置作製方法 Granted JPS60123072A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58231010A JPS60123072A (ja) 1983-12-07 1983-12-07 半導体装置作製方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58231010A JPS60123072A (ja) 1983-12-07 1983-12-07 半導体装置作製方法

Publications (2)

Publication Number Publication Date
JPS60123072A JPS60123072A (ja) 1985-07-01
JPH0518275B2 true JPH0518275B2 (enrdf_load_stackoverflow) 1993-03-11

Family

ID=16916828

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58231010A Granted JPS60123072A (ja) 1983-12-07 1983-12-07 半導体装置作製方法

Country Status (1)

Country Link
JP (1) JPS60123072A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011004631A1 (ja) 2009-07-10 2011-01-13 三菱重工業株式会社 光電変換装置の製造方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6077722A (en) * 1998-07-14 2000-06-20 Bp Solarex Producing thin film photovoltaic modules with high integrity interconnects and dual layer contacts
JP4837662B2 (ja) * 2005-06-22 2011-12-14 京セラ株式会社 太陽電池素子の製造方法
JPWO2010087320A1 (ja) * 2009-01-27 2012-08-02 株式会社アルバック 太陽電池及び太陽電池の製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6041878B2 (ja) * 1979-02-14 1985-09-19 シャープ株式会社 薄膜太陽電池装置
JPS60113478A (ja) * 1983-11-24 1985-06-19 Semiconductor Energy Lab Co Ltd 半導体装置用電極の作製方法
JPS60120577A (ja) * 1983-12-05 1985-06-28 Semiconductor Energy Lab Co Ltd 半導体装置用電極の作製方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011004631A1 (ja) 2009-07-10 2011-01-13 三菱重工業株式会社 光電変換装置の製造方法

Also Published As

Publication number Publication date
JPS60123072A (ja) 1985-07-01

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