JPH0518022Y2 - - Google Patents

Info

Publication number
JPH0518022Y2
JPH0518022Y2 JP8696787U JP8696787U JPH0518022Y2 JP H0518022 Y2 JPH0518022 Y2 JP H0518022Y2 JP 8696787 U JP8696787 U JP 8696787U JP 8696787 U JP8696787 U JP 8696787U JP H0518022 Y2 JPH0518022 Y2 JP H0518022Y2
Authority
JP
Japan
Prior art keywords
workpiece
holder
attachment
hand
tool
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP8696787U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63197025U (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8696787U priority Critical patent/JPH0518022Y2/ja
Publication of JPS63197025U publication Critical patent/JPS63197025U/ja
Application granted granted Critical
Publication of JPH0518022Y2 publication Critical patent/JPH0518022Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Automatic Assembly (AREA)
  • Feeding Of Workpieces (AREA)
JP8696787U 1987-06-04 1987-06-04 Expired - Lifetime JPH0518022Y2 (en))

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8696787U JPH0518022Y2 (en)) 1987-06-04 1987-06-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8696787U JPH0518022Y2 (en)) 1987-06-04 1987-06-04

Publications (2)

Publication Number Publication Date
JPS63197025U JPS63197025U (en)) 1988-12-19
JPH0518022Y2 true JPH0518022Y2 (en)) 1993-05-13

Family

ID=30943759

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8696787U Expired - Lifetime JPH0518022Y2 (en)) 1987-06-04 1987-06-04

Country Status (1)

Country Link
JP (1) JPH0518022Y2 (en))

Also Published As

Publication number Publication date
JPS63197025U (en)) 1988-12-19

Similar Documents

Publication Publication Date Title
EP0118052B1 (en) Robot object manipulator with changeable finger tools
JPH0518022Y2 (en))
KR20110095998A (ko) 웨이퍼 측면파지 이송용 집게의 구동기구
US4462748A (en) Industrial robot
WO2003014000A3 (en) Edge gripping pre-aligner
JPS58114875A (ja) 産業用ロボツト
JPH0683983B2 (ja) 把持装置
US4705313A (en) Selective gripping of inside and outside of articles
JPS62181892A (ja) 把持ハンド
JPS63172439A (ja) 半導体ウエ−ハ移送装置
JPH0694306B2 (ja) 回転移載装置
JPH02256488A (ja) ロボット・ハンド
KR0170485B1 (ko) 웨이퍼 측면파지 이송용 집게의 구동기구
JPH07201947A (ja) ウェハー搬送用のロボットハンドおよびこのロボットハンドによるウェハーの保持方法
JPH019171Y2 (en))
JPS6254638A (ja) 工具交換装置
JP2000042969A (ja) 部品把持装置
CN215968804U (zh) 一种工业机器人用机械夹取装置
JPS6137480Y2 (en))
JP2697268B2 (ja) ロボットハンド
JPH074786B2 (ja) 工業用ロボツトのハンド装置
JPS5975641A (ja) 半導体基板チヤツク装置
JP2024175318A (ja) チップ除去装置、および、チップ除去方法
JP2853035B2 (ja) コンテナ把持用具
JP2001079789A (ja) クランプ装置