JPH05171B2 - - Google Patents

Info

Publication number
JPH05171B2
JPH05171B2 JP62062592A JP6259287A JPH05171B2 JP H05171 B2 JPH05171 B2 JP H05171B2 JP 62062592 A JP62062592 A JP 62062592A JP 6259287 A JP6259287 A JP 6259287A JP H05171 B2 JPH05171 B2 JP H05171B2
Authority
JP
Japan
Prior art keywords
polished
polishing
polishing tool
tool
rotated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP62062592A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63232932A (ja
Inventor
Manabu Ando
Nobuo Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP6259287A priority Critical patent/JPS63232932A/ja
Publication of JPS63232932A publication Critical patent/JPS63232932A/ja
Priority to US07/401,477 priority patent/US4956944A/en
Publication of JPH05171B2 publication Critical patent/JPH05171B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
JP6259287A 1987-03-19 1987-03-19 修正研磨方法およびその装置 Granted JPS63232932A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP6259287A JPS63232932A (ja) 1987-03-19 1987-03-19 修正研磨方法およびその装置
US07/401,477 US4956944A (en) 1987-03-19 1989-08-29 Polishing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6259287A JPS63232932A (ja) 1987-03-19 1987-03-19 修正研磨方法およびその装置

Publications (2)

Publication Number Publication Date
JPS63232932A JPS63232932A (ja) 1988-09-28
JPH05171B2 true JPH05171B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-01-05

Family

ID=13204748

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6259287A Granted JPS63232932A (ja) 1987-03-19 1987-03-19 修正研磨方法およびその装置

Country Status (1)

Country Link
JP (1) JPS63232932A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101866438B1 (ko) * 2012-06-29 2018-06-11 동우 화인켐 주식회사 점착제 조성물

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2513426B2 (ja) * 1993-09-20 1996-07-03 日本電気株式会社 ウェ―ハ研磨装置
JPH10329012A (ja) * 1997-03-21 1998-12-15 Canon Inc 研磨装置および研磨方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS618269A (ja) * 1984-06-22 1986-01-14 Canon Inc 曲面研摩機
JPS6133665A (ja) * 1984-07-27 1986-02-17 新技術開発事業団 人工心肺装置におけるコラプス解消装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101866438B1 (ko) * 2012-06-29 2018-06-11 동우 화인켐 주식회사 점착제 조성물

Also Published As

Publication number Publication date
JPS63232932A (ja) 1988-09-28

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees