JPH0516193Y2 - - Google Patents

Info

Publication number
JPH0516193Y2
JPH0516193Y2 JP1987003214U JP321487U JPH0516193Y2 JP H0516193 Y2 JPH0516193 Y2 JP H0516193Y2 JP 1987003214 U JP1987003214 U JP 1987003214U JP 321487 U JP321487 U JP 321487U JP H0516193 Y2 JPH0516193 Y2 JP H0516193Y2
Authority
JP
Japan
Prior art keywords
turntable
substrate
motor
glass
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987003214U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63110538U (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987003214U priority Critical patent/JPH0516193Y2/ja
Publication of JPS63110538U publication Critical patent/JPS63110538U/ja
Application granted granted Critical
Publication of JPH0516193Y2 publication Critical patent/JPH0516193Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Glass Melting And Manufacturing (AREA)
  • Surface Treatment Of Glass (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP1987003214U 1987-01-13 1987-01-13 Expired - Lifetime JPH0516193Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987003214U JPH0516193Y2 (OSRAM) 1987-01-13 1987-01-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987003214U JPH0516193Y2 (OSRAM) 1987-01-13 1987-01-13

Publications (2)

Publication Number Publication Date
JPS63110538U JPS63110538U (OSRAM) 1988-07-15
JPH0516193Y2 true JPH0516193Y2 (OSRAM) 1993-04-28

Family

ID=30782769

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987003214U Expired - Lifetime JPH0516193Y2 (OSRAM) 1987-01-13 1987-01-13

Country Status (1)

Country Link
JP (1) JPH0516193Y2 (OSRAM)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5441388A (en) * 1977-09-08 1979-04-02 Banyu Pharmaceut Co Ltd Preparation of cephradine
JPS5626784A (en) * 1979-08-07 1981-03-14 Tokyo Shibaura Electric Co Glass coated substrate
JPS5748851A (en) * 1980-09-08 1982-03-20 Goda Tadayoshi Display device for calling number of telephone set

Also Published As

Publication number Publication date
JPS63110538U (OSRAM) 1988-07-15

Similar Documents

Publication Publication Date Title
JPH0516193Y2 (OSRAM)
JP2007243060A (ja) 気相成長装置
JPH0639358B2 (ja) 有機金属気相成長装置
JPS63134663A (ja) カ−ボン基材面への被膜形成方法
JPS63150912A (ja) 薄膜生成装置
JPS63239134A (ja) ガラス微粒子堆積法
JPS58114763A (ja) 薄膜形成方法
JPH069235A (ja) 火炎堆積方法
JPH066791B2 (ja) 減圧気相成長装置
KR100392796B1 (ko) 웨이퍼 가열용 턴테이블 장치
JP2002006125A (ja) 反射板
JPH013025A (ja) ガラス膜堆積装置
JPS6360275A (ja) スパツタリング装置
CN2437694Y (zh) 非铁基表面硅化钛涂层装置
CN102828171A (zh) 薄膜形成用旋转系统
JPH03120367A (ja) Ｃｖｄ反応炉の覆い蓋
JPH0860369A (ja) 化学気相成長装置
JPH06349748A (ja) 半導体気相成長装置
JPH06135728A (ja) 酸化物ガラス薄膜の製造装置
JPH04157717A (ja) 気相成長用ウエハ加熱装置
JPS6333958Y2 (OSRAM)
JPS60149781A (ja) 化学蒸着装置の被蒸着基体加熱装置
JP2775837B2 (ja) 化学気相成長装置
JPH08262252A (ja) 光導波路膜の製造方法
JPS63183175A (ja) 超微粒子薄膜の製造方法