JPH0515303B2 - - Google Patents

Info

Publication number
JPH0515303B2
JPH0515303B2 JP1064938A JP6493889A JPH0515303B2 JP H0515303 B2 JPH0515303 B2 JP H0515303B2 JP 1064938 A JP1064938 A JP 1064938A JP 6493889 A JP6493889 A JP 6493889A JP H0515303 B2 JPH0515303 B2 JP H0515303B2
Authority
JP
Japan
Prior art keywords
gate electrode
forming
shot
electrode
shot gate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1064938A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0249436A (ja
Inventor
Naoki Yokoyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP6493889A priority Critical patent/JPH0249436A/ja
Publication of JPH0249436A publication Critical patent/JPH0249436A/ja
Publication of JPH0515303B2 publication Critical patent/JPH0515303B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Junction Field-Effect Transistors (AREA)
JP6493889A 1989-03-18 1989-03-18 半導体装置の製造方法 Granted JPH0249436A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6493889A JPH0249436A (ja) 1989-03-18 1989-03-18 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6493889A JPH0249436A (ja) 1989-03-18 1989-03-18 半導体装置の製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP55189544A Division JPS57113289A (en) 1980-12-30 1980-12-30 Semiconductor device and its manufacture

Publications (2)

Publication Number Publication Date
JPH0249436A JPH0249436A (ja) 1990-02-19
JPH0515303B2 true JPH0515303B2 (cs) 1993-03-01

Family

ID=13272476

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6493889A Granted JPH0249436A (ja) 1989-03-18 1989-03-18 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPH0249436A (cs)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS535581A (en) * 1976-07-06 1978-01-19 Toshiba Corp Schottky gate type field effect transistor
JPS53125777A (en) * 1977-04-08 1978-11-02 Nec Corp Manufacture for field effect transistor
JPS57113289A (en) * 1980-12-30 1982-07-14 Fujitsu Ltd Semiconductor device and its manufacture
JP2769162B2 (ja) * 1988-07-08 1998-06-25 富士通株式会社 Ｃａｄシステムにおける操作復元処理方式

Also Published As

Publication number Publication date
JPH0249436A (ja) 1990-02-19

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