JPH0514857B2 - - Google Patents

Info

Publication number
JPH0514857B2
JPH0514857B2 JP60140147A JP14014785A JPH0514857B2 JP H0514857 B2 JPH0514857 B2 JP H0514857B2 JP 60140147 A JP60140147 A JP 60140147A JP 14014785 A JP14014785 A JP 14014785A JP H0514857 B2 JPH0514857 B2 JP H0514857B2
Authority
JP
Japan
Prior art keywords
scanning
foreign matter
polarized
inspected
elliptical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60140147A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6211138A (ja
Inventor
Ryoji Nemoto
Toshiaki Yanai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP14014785A priority Critical patent/JPS6211138A/ja
Publication of JPS6211138A publication Critical patent/JPS6211138A/ja
Publication of JPH0514857B2 publication Critical patent/JPH0514857B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
JP14014785A 1985-06-28 1985-06-28 異物検査装置 Granted JPS6211138A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14014785A JPS6211138A (ja) 1985-06-28 1985-06-28 異物検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14014785A JPS6211138A (ja) 1985-06-28 1985-06-28 異物検査装置

Publications (2)

Publication Number Publication Date
JPS6211138A JPS6211138A (ja) 1987-01-20
JPH0514857B2 true JPH0514857B2 (cs) 1993-02-26

Family

ID=15261963

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14014785A Granted JPS6211138A (ja) 1985-06-28 1985-06-28 異物検査装置

Country Status (1)

Country Link
JP (1) JPS6211138A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5547969B2 (ja) * 2010-01-04 2014-07-16 日置電機株式会社 測光装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5594145A (en) * 1979-01-12 1980-07-17 Hitachi Ltd Method of and device for inspecting surface of article
JPS5599049A (en) * 1979-01-24 1980-07-28 Toshiba Corp Defect detector
JPS57163852A (en) * 1981-03-31 1982-10-08 Matsushita Electric Works Ltd Detector for sample surface defect

Also Published As

Publication number Publication date
JPS6211138A (ja) 1987-01-20

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