JPH0510426B2 - - Google Patents

Info

Publication number
JPH0510426B2
JPH0510426B2 JP60179025A JP17902585A JPH0510426B2 JP H0510426 B2 JPH0510426 B2 JP H0510426B2 JP 60179025 A JP60179025 A JP 60179025A JP 17902585 A JP17902585 A JP 17902585A JP H0510426 B2 JPH0510426 B2 JP H0510426B2
Authority
JP
Japan
Prior art keywords
film
hard carbon
carbon film
atm
hardness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60179025A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6240375A (ja
Inventor
Kenji Yamamoto
Takehisa Nakayama
Yoshihisa Oowada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kanegafuchi Chemical Industry Co Ltd
Original Assignee
Kanegafuchi Chemical Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kanegafuchi Chemical Industry Co Ltd filed Critical Kanegafuchi Chemical Industry Co Ltd
Priority to JP60179025A priority Critical patent/JPS6240375A/ja
Publication of JPS6240375A publication Critical patent/JPS6240375A/ja
Publication of JPH0510426B2 publication Critical patent/JPH0510426B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Carbon And Carbon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)
JP60179025A 1985-08-14 1985-08-14 硬質カ−ボン膜 Granted JPS6240375A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60179025A JPS6240375A (ja) 1985-08-14 1985-08-14 硬質カ−ボン膜

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60179025A JPS6240375A (ja) 1985-08-14 1985-08-14 硬質カ−ボン膜

Publications (2)

Publication Number Publication Date
JPS6240375A JPS6240375A (ja) 1987-02-21
JPH0510426B2 true JPH0510426B2 (enrdf_load_stackoverflow) 1993-02-09

Family

ID=16058796

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60179025A Granted JPS6240375A (ja) 1985-08-14 1985-08-14 硬質カ−ボン膜

Country Status (1)

Country Link
JP (1) JPS6240375A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5275850A (en) * 1988-04-20 1994-01-04 Hitachi, Ltd. Process for producing a magnetic disk having a metal containing hard carbon coating by plasma chemical vapor deposition under a negative self bias
JPH0649645A (ja) * 1992-07-31 1994-02-22 Yoshida Kogyo Kk <Ykk> 硬質多層膜形成体およびその製造方法
JP2000064047A (ja) * 1998-06-26 2000-02-29 James A Mclaughlin ダイヤモンド様炭素（ｄｌｃ）又は他の真空蒸着被膜を基体に被覆する装置及び方法
JP2007320142A (ja) * 2006-05-31 2007-12-13 Meisho Kiko Kk ナノインプリント用モールド
WO2018226370A1 (en) * 2017-06-08 2018-12-13 Applied Materials, Inc. High-density low temperature carbon films for hardmask and other patterning applications

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60145375A (ja) * 1984-01-09 1985-07-31 Nippon Telegr & Teleph Corp <Ntt> Νｂ膜表面の不動態化処理方法

Also Published As

Publication number Publication date
JPS6240375A (ja) 1987-02-21

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