JPH0510316Y2 - - Google Patents

Info

Publication number
JPH0510316Y2
JPH0510316Y2 JP8285487U JP8285487U JPH0510316Y2 JP H0510316 Y2 JPH0510316 Y2 JP H0510316Y2 JP 8285487 U JP8285487 U JP 8285487U JP 8285487 U JP8285487 U JP 8285487U JP H0510316 Y2 JPH0510316 Y2 JP H0510316Y2
Authority
JP
Japan
Prior art keywords
cleaning liquid
turntable
upper chamber
cleaning
optical information
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP8285487U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63193277U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8285487U priority Critical patent/JPH0510316Y2/ja
Publication of JPS63193277U publication Critical patent/JPS63193277U/ja
Application granted granted Critical
Publication of JPH0510316Y2 publication Critical patent/JPH0510316Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP8285487U 1987-05-29 1987-05-29 Expired - Lifetime JPH0510316Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8285487U JPH0510316Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-05-29 1987-05-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8285487U JPH0510316Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-05-29 1987-05-29

Publications (2)

Publication Number Publication Date
JPS63193277U JPS63193277U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-12-13
JPH0510316Y2 true JPH0510316Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-03-12

Family

ID=30935890

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8285487U Expired - Lifetime JPH0510316Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-05-29 1987-05-29

Country Status (1)

Country Link
JP (1) JPH0510316Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS63193277U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-12-13

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