JPH049251B2 - - Google Patents
Info
- Publication number
- JPH049251B2 JPH049251B2 JP22867282A JP22867282A JPH049251B2 JP H049251 B2 JPH049251 B2 JP H049251B2 JP 22867282 A JP22867282 A JP 22867282A JP 22867282 A JP22867282 A JP 22867282A JP H049251 B2 JPH049251 B2 JP H049251B2
- Authority
- JP
- Japan
- Prior art keywords
- hole
- light
- defect
- signal
- indication signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000007547 defect Effects 0.000 claims description 68
- 238000001514 detection method Methods 0.000 claims description 37
- 238000007689 inspection Methods 0.000 claims description 23
- 238000005286 illumination Methods 0.000 claims description 19
- 239000000758 substrate Substances 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 12
- 230000004044 response Effects 0.000 claims description 8
- 230000000903 blocking effect Effects 0.000 claims description 6
- 230000002950 deficient Effects 0.000 claims description 3
- 230000000873 masking effect Effects 0.000 claims description 2
- 238000000926 separation method Methods 0.000 claims description 2
- 239000004973 liquid crystal related substance Substances 0.000 claims 1
- 230000000694 effects Effects 0.000 description 6
- 238000007747 plating Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
- 238000001444 catalytic combustion detection Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22867282A JPS59125693A (ja) | 1982-12-28 | 1982-12-28 | スルーホール検査法及びその検査装置 |
| US06/554,543 US4560273A (en) | 1982-11-30 | 1983-11-23 | Method and apparatus for inspecting plated through holes in printed circuit boards |
| DE8383307291T DE3377527D1 (en) | 1982-11-30 | 1983-11-30 | Method and apparatus for inspecting plated through holes in printed circuit boards |
| EP83307291A EP0111404B1 (en) | 1982-11-30 | 1983-11-30 | Method and apparatus for inspecting plated through holes in printed circuit boards |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22867282A JPS59125693A (ja) | 1982-12-28 | 1982-12-28 | スルーホール検査法及びその検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59125693A JPS59125693A (ja) | 1984-07-20 |
| JPH049251B2 true JPH049251B2 (enrdf_load_stackoverflow) | 1992-02-19 |
Family
ID=16880000
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22867282A Granted JPS59125693A (ja) | 1982-11-30 | 1982-12-28 | スルーホール検査法及びその検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59125693A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62299747A (ja) * | 1986-06-19 | 1987-12-26 | Fujitsu Ltd | スル−ホ−ル検査装置 |
| JP2002365226A (ja) * | 2001-06-04 | 2002-12-18 | Hamamatsu Photonics Kk | ピンホール検出器 |
-
1982
- 1982-12-28 JP JP22867282A patent/JPS59125693A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59125693A (ja) | 1984-07-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4224863B2 (ja) | 検査装置及び検査方法、並びにパターン基板の製造方法 | |
| US6175645B1 (en) | Optical inspection method and apparatus | |
| JPH049251B2 (enrdf_load_stackoverflow) | ||
| JPS62119444A (ja) | パタ−ン検査装置 | |
| JPS6262253A (ja) | スル−ホ−ル検査装置 | |
| JPH0621607A (ja) | スルーホール検査装置及びそれを用いるスルーホール検査方法 | |
| JPS62299746A (ja) | スル−ホ−ル欠陥検査装置 | |
| JPS61202146A (ja) | スル−ホ−ル検査方法とその装置 | |
| JPS62197747A (ja) | 蒸気もれ検出装置 | |
| JPS5970947A (ja) | 印刷配線基板のパタ−ン検出方法 | |
| JPH04316346A (ja) | パターン認識方法 | |
| JPH04178542A (ja) | スルーホール検査装置 | |
| JP2503201B2 (ja) | スル−ホ−ル検査装置 | |
| JPH0263185B2 (enrdf_load_stackoverflow) | ||
| JPS63205547A (ja) | パタ−ン検知装置 | |
| JPS6221045A (ja) | スル−ホ−ル検査装置 | |
| KR0179226B1 (ko) | 부품의 장착 상태 검사장치 및 방법 | |
| JPS60253222A (ja) | 欠陥検査方法 | |
| JPS6215442A (ja) | パタ−ン検査方法とその装置 | |
| JPH01157029A (ja) | パターン検査装置 | |
| JPH049252B2 (enrdf_load_stackoverflow) | ||
| JPH0340333B2 (enrdf_load_stackoverflow) | ||
| JPS59102106A (ja) | 検査方式 | |
| JPS6175240A (ja) | スルホ−ル検査装置 | |
| JPS62237305A (ja) | パタ−ン欠陥検査方法 |