JPS59125693A - スルーホール検査法及びその検査装置 - Google Patents

スルーホール検査法及びその検査装置

Info

Publication number
JPS59125693A
JPS59125693A JP22867282A JP22867282A JPS59125693A JP S59125693 A JPS59125693 A JP S59125693A JP 22867282 A JP22867282 A JP 22867282A JP 22867282 A JP22867282 A JP 22867282A JP S59125693 A JPS59125693 A JP S59125693A
Authority
JP
Japan
Prior art keywords
hole
ball
defect
conductive layer
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22867282A
Other languages
English (en)
Japanese (ja)
Other versions
JPH049251B2 (enrdf_load_stackoverflow
Inventor
護俊 安藤
三田 喜久夫
柿木 義一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP22867282A priority Critical patent/JPS59125693A/ja
Priority to US06/554,543 priority patent/US4560273A/en
Priority to DE8383307291T priority patent/DE3377527D1/de
Priority to EP83307291A priority patent/EP0111404B1/en
Publication of JPS59125693A publication Critical patent/JPS59125693A/ja
Publication of JPH049251B2 publication Critical patent/JPH049251B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP22867282A 1982-11-30 1982-12-28 スルーホール検査法及びその検査装置 Granted JPS59125693A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP22867282A JPS59125693A (ja) 1982-12-28 1982-12-28 スルーホール検査法及びその検査装置
US06/554,543 US4560273A (en) 1982-11-30 1983-11-23 Method and apparatus for inspecting plated through holes in printed circuit boards
DE8383307291T DE3377527D1 (en) 1982-11-30 1983-11-30 Method and apparatus for inspecting plated through holes in printed circuit boards
EP83307291A EP0111404B1 (en) 1982-11-30 1983-11-30 Method and apparatus for inspecting plated through holes in printed circuit boards

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22867282A JPS59125693A (ja) 1982-12-28 1982-12-28 スルーホール検査法及びその検査装置

Publications (2)

Publication Number Publication Date
JPS59125693A true JPS59125693A (ja) 1984-07-20
JPH049251B2 JPH049251B2 (enrdf_load_stackoverflow) 1992-02-19

Family

ID=16880000

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22867282A Granted JPS59125693A (ja) 1982-11-30 1982-12-28 スルーホール検査法及びその検査装置

Country Status (1)

Country Link
JP (1) JPS59125693A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62299747A (ja) * 1986-06-19 1987-12-26 Fujitsu Ltd スル−ホ−ル検査装置
JP2002365226A (ja) * 2001-06-04 2002-12-18 Hamamatsu Photonics Kk ピンホール検出器

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62299747A (ja) * 1986-06-19 1987-12-26 Fujitsu Ltd スル−ホ−ル検査装置
JP2002365226A (ja) * 2001-06-04 2002-12-18 Hamamatsu Photonics Kk ピンホール検出器

Also Published As

Publication number Publication date
JPH049251B2 (enrdf_load_stackoverflow) 1992-02-19

Similar Documents

Publication Publication Date Title
US6175645B1 (en) Optical inspection method and apparatus
JPS59125693A (ja) スルーホール検査法及びその検査装置
JPS62119444A (ja) パタ−ン検査装置
JPS6262253A (ja) スル−ホ−ル検査装置
JPH0621607A (ja) スルーホール検査装置及びそれを用いるスルーホール検査方法
JPS5970947A (ja) 印刷配線基板のパタ−ン検出方法
JP2503201B2 (ja) スル−ホ−ル検査装置
JPS62299746A (ja) スル−ホ−ル欠陥検査装置
JPS619772A (ja) スルホ−ル検査装置
JPS63205547A (ja) パタ−ン検知装置
JPH03110454A (ja) ウエハ異物検査装置における被検物の動画像記録方式
JPH05157517A (ja) 配線検出装置及びこの装置を用いて配線を検査する方法
JPH04221747A (ja) スルーホール検査方法及び装置
JPH04178542A (ja) スルーホール検査装置
JPH0531563Y2 (enrdf_load_stackoverflow)
JPH02122246A (ja) プリント配線基板のスルーホール検査装置
JPS6215442A (ja) パタ−ン検査方法とその装置
JPS59102106A (ja) 検査方式
JPS61202146A (ja) スル−ホ−ル検査方法とその装置
JPS58105591A (ja) パタ−ン検知方法
JPS6145955A (ja) スル−ホ−ル検査法
JPS6086404A (ja) スル−ホ−ル欠陥検査法
JPH07190947A (ja) 欠陥検査装置及び欠陥検査方法
JPH0567194A (ja) 光学式基板検査装置
JPS62299707A (ja) 実装部品検査装置