JPH0481211B2 - - Google Patents
Info
- Publication number
- JPH0481211B2 JPH0481211B2 JP24741585A JP24741585A JPH0481211B2 JP H0481211 B2 JPH0481211 B2 JP H0481211B2 JP 24741585 A JP24741585 A JP 24741585A JP 24741585 A JP24741585 A JP 24741585A JP H0481211 B2 JPH0481211 B2 JP H0481211B2
- Authority
- JP
- Japan
- Prior art keywords
- upper table
- rollers
- positioning
- wedge block
- roller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000001105 regulatory effect Effects 0.000 claims description 12
- 230000000694 effects Effects 0.000 description 2
- NCGICGYLBXGBGN-UHFFFAOYSA-N 3-morpholin-4-yl-1-oxa-3-azonia-2-azanidacyclopent-3-en-5-imine;hydrochloride Chemical compound Cl.[N-]1OC(=N)C=[N+]1N1CCOCC1 NCGICGYLBXGBGN-UHFFFAOYSA-N 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Control Of Position Or Direction (AREA)
- Details Of Measuring And Other Instruments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24741585A JPS62107312A (ja) | 1985-11-05 | 1985-11-05 | 位置決めテ−ブル |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24741585A JPS62107312A (ja) | 1985-11-05 | 1985-11-05 | 位置決めテ−ブル |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62107312A JPS62107312A (ja) | 1987-05-18 |
| JPH0481211B2 true JPH0481211B2 (zh) | 1992-12-22 |
Family
ID=17163093
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24741585A Granted JPS62107312A (ja) | 1985-11-05 | 1985-11-05 | 位置決めテ−ブル |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62107312A (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4647273B2 (ja) * | 2004-09-24 | 2011-03-09 | Ｈｏｙａ株式会社 | ステージ駆動機構 |
-
1985
- 1985-11-05 JP JP24741585A patent/JPS62107312A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4647273B2 (ja) * | 2004-09-24 | 2011-03-09 | Ｈｏｙａ株式会社 | ステージ駆動機構 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62107312A (ja) | 1987-05-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |